Fabrication of microscale axial symmetric three-dimensional curved shell resonators based on silicon isotropic wet etching

Xu-ye ZHUANG; Bing-gen CHEN; Ping-hua LI; Xin-long WANG; Wei-da CAO; Jing-bing DING

doi:10.3788/OPE.20192706.1293

您当前的位置：

首页 >

文章列表页 >

Fabrication of microscale axial symmetric three-dimensional curved shell resonators based on silicon isotropic wet etching

Life Science Instrument | 更新时间：2020-08-13

- Fabrication of microscale axial symmetric three-dimensional curved shell resonators based on silicon isotropic wet etching
- Optics and Precision Engineering Vol. 27, Issue 6, Pages: 1293-1300(2019)
- 作者机构：
  
  华东光电集成器件研究所，安徽蚌埠 233042
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20192706.1293
  CLC： TP212.9
- Received：18 December 2018，
  
  Accepted：16 February 2019，
  
  Published：15 June 2019
- 稿件说明：
移动端阅览
Xu-ye ZHUANG, Bing-gen CHEN, Ping-hua LI, et al. Fabrication of microscale axial symmetric three-dimensional curved shell resonators based on silicon isotropic wet etching[J]. Optics and precision engineering, 2019, 27(6): 1293-1300.
DOI：

Xu-ye ZHUANG, Bing-gen CHEN, Ping-hua LI, et al. Fabrication of microscale axial symmetric three-dimensional curved shell resonators based on silicon isotropic wet etching[J]. Optics and precision engineering, 2019, 27(6): 1293-1300. DOI： 10.3788/OPE.20192706.1293.

摘要

轴对称3D曲面壳体谐振器具有自身对称性好、耐冲击能力强、可靠性高的特点，是应用最为广泛的谐振器之一，但因制备工艺涉及薄壳结构的曲面成形过程，属于MEMS 3D工艺，很难进行批量化制备。基于硅各向同性湿法技术对多晶硅3D曲面壳体谐振器的批量化制备工艺进行了实验研究。设计了脱模法制备多晶硅3D曲面壳体结构的工艺流程，实验优选体积比为15:10:75的醋酸、氢氟酸、硝酸的混合液各向同性腐蚀制备硅半球腔模具，利用自制的水浴设备和水平度可调夹具，对刻蚀液温度和扩散速度进行了有效控制，减弱了反应放热和硅基片放置不水平对硅半球腔圆度与粗糙度的影响。制备了直径为0.8~1.3 mm的多晶硅3D曲面壳体结构，测试对称性最好优于0.4%，多晶硅3D曲面壳体结构的表面粗糙度优于1 nm。在0.2 Pa的压强下，激光多普勒测试得到曲面壳体谐振器的谐振频率为28 kHz，

值为14 365，调节驱动电压和偏置电压可实现谐振器四波腹谐振模态的模式匹配，基频差趋于零。

Abstract

Axial symmetric curved shell resonators are among the most-widely used resonators because of their high symmetry

robustness

and reliability. However

the fabrication of this kind of resonator is based on newly developed three-dimensional (3D) microelectromechanical system technologies

making it difficult to fabricate. Polysilicon shell resonator is suitable for batch fabrication owing to its compatibility with the materials and fabrication technologies used in the IC industry

which is of high value and should be studied thoroughly. A 3D polysilicon shell resonator with high symmetry was produced using silicon cave as its mold

and the fabrication process was designed and tested experimentally. The cave was formed by isotropic etching of silicon

using a mixture of HF/HNO

/CH

CHOOH with bulk ratio 15:10:75 as the etchant. The temperature of the etchant was controlled using a water bath to ensure that the speed of the etching does not change abruptly. The level of the wafer was maintained by a clamp with which the wafers position could be adjusted freely. The abovementioned measures ensured that the silicon caves had good properties

especially the symmetry and roughness. Then

3D polysilicon shells with diameters ranging from 0.8 to 1.3 mm were fabricated

with the smallest roundness less than 0.4%. The roughness of the shell was less than 1 nm. The resonant properties of the fabricated shells were investigated using noncontact characterization methods facilitated by a laser Doppler vibrometer. A mechanical quality (

) of 14 365 at 28 kHz was obtained in vacuum with a pressure of 0.2 Pa. By adjusting the bias voltage and actuated voltage

the mode-matching situation was achieved

and the relative frequency mismatch between the two degenerate four-node wineglass modes was reduced to zero.

关键词

Keywords

references

汪红兵, 林丙涛, 梅松, 等.微半球谐振陀螺技术研究进展[J].微纳电子技术, 2017, 54(11): 772-780.

WANG H B, LIN B T, MEI S, et al .. Research development of micro hemispherical resonator gyro (μHRG) technology[J]. Micronanoelectronic Technolog, 2017(5):772-780.(in Chinese)

SINGH S, NAGOURNEY T, CHO J Y, et al .. Design and fabrication of high-Q birdbath resonator for MEMS gyroscopes[C]. IEEE PLANS 2018, Monterey, USA, 2018: 15-19.

ZHUANG X Y, CHEN B G, WANG X L, et al .. Microsacle polysilicon hemispherical shell resonating gyroscopes with integrated three-dimensional curved electrodes[J]. Journal of Physics: Conf. Series , 2018, 986: 012022.

ZHUANG L Y, WANG X L, LI P H, et al .. Fabrication of 3D spherical electrodes of MEMs hemispherical gyros[J]. Micro-Nano Technology, 2017, XVⅡ-XVⅢ: 230-235.

SHAO P, C L M, GAO X, et al .. A polysilicon microhemispherical resonating gyroscope[J]. Journal of Microelectromechanical Systems , 2014, 23(4): 762-764.

DAISUKE S, AMIR HEIDARI C Y, NAJAR H, et al .. Microcrystalline diamond cylindrical resonators with quality-factor up to 0.5 million[J]. Applied Physics Letters , 2016, 108: 051904.

SHAO P, GAO X, AYAZI F. Wineglass-on-a-chip[C]. Proceedings of the Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2012), Hilton Head Island, CA, USA, 2012: 3-7.

NISHANTH MEHANATHAN V T, SHAO P, SORENSON L, et al .. Invar-36 micro hemispherical shell resonators[C]. IEEE MEMS 2014, San Francisco, USA, 2014: 40-43.

SORENSON X G, AYAZI F. 3-D micromachined hemispherical shell resonators with integrated capacitive transducers[C]. IEEE MEMS 2012, Pairs, France, 2012: 677-680.

PENG SHAO V T, MAYBERRY C L, AYAZI F. A 3D-HARPSS polysilicon microhemispherical shell resonating gyroscope: design, fabrication, and characterization[J]. IEEE Sensors Journal, 2015, 15(9): 4974-4985.

HEIDARI M-L C, YANG H A, JARAMILLO G, et al .. Micromachined polycrystalline diamond hemispherical shell resonators[J]. IEEE Transducer 2013, Barcelona, SPAIN, 2013:2415-2418.

LI T, VISVANATHAN K, GIANCHANDANI Y B. A batch-mode micromachining process for spherical structures[J]. Journal of Micromechanics and Microengineering, 2014, 24(2): 025002.

PRADEEP P, CHOWDHURY F K, POURZAND H, et al .. Fabrication and testing of hemispherical MEMS wineglass resonators[C]. IEEE MEMS 2013, Taipei, 2013: 677-680.

JONATHAN J, BERNSTEIN M G B, JOSEPH M B.High Q diamond hemispherical resonators: fabrication and energy loss mechanisms[J]. J. Micromech. Microeng. , 2015 (25): 085006.

LIU ZH G, AN J, WANG J Q, et al .. Silicon etching in HF/HNO 3 /NH 3 ·H 2 O/H 2 O system[J]. Journal of the Electrochemical Society, 2007, 154(1): D21-D29.

庄须叶, 喻磊, 王新龙, 等. MEMS硅半球陀螺球面电极成形工艺[J].光学精密工程, 2016, 24(11): 2746-2752.

ZHUANG X Y, YU L, WANG X L, et al .. Development of spherical capacitive electrodes of MEMS silicon hemispherical gyros[J]. Opt. Precision Eng. , 2016, 24(11):2746-2752.(in Chinese)

PAI F K C, CARLOS H, MASTRANGELO, et al .. MEMS-based hemispherical resonator gyroscopes[C]. IEEE MEMS 2012, Pairs, France, 2012: 978-1-4577-1767.

Views

133

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Thermoacoustic efficiency of graphene sound-generators using different structures

MEMS gyro denoising based on fuzzy interval threshold EMD

Development of capacitive MEMS vibrating ring gyroscope

Auto-focusing in optical microscopy for machine-vision-based precise measurement

MEMS based electrochemical seismic sensors with planar electrodes

Related Author

De-bo WANG

Xing-yue HE

Ji-hao XIN

Guang-wu CHEN

Wen-yuan LI

Yue YU

Zhi-wei KOU

Hui-liang CAO

Related Institution

College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunication

Automatic Control Research Institute, Lanzhou Jiaotong University

Gansu Provincial Key Laboratory of Traffic Information Engineering and Control

Science and Technology on Electronic Test & Measurement Laboratory, North University of China

College of Electric Power, Inner Mongolia University of Technology

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰