Large aperture optical element wavefront gradient controlled by computer numerical controlled polishing

Jin-yong HUANG; Heng ZHAO; Qing HU; Xu-hua GAO

doi:10.3788/OPE.20192707.1473

您当前的位置：

首页 >

文章列表页 >

Large aperture optical element wavefront gradient controlled by computer numerical controlled polishing

Modern Applied Optics | 更新时间：2020-08-13

- Large aperture optical element wavefront gradient controlled by computer numerical controlled polishing
- Optics and Precision Engineering Vol. 27, Issue 7, Pages: 1473-1480(2019)
- 作者机构：
  
  成都精密光学工程研究中心，四川成都 610041
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20192707.1473
  CLC： TG74
- Received：26 February 2019，
  
  Accepted：18 March 2019，
  
  Published：15 July 2019
- 稿件说明：
移动端阅览
Jin-yong HUANG, Heng ZHAO, Qing HU, et al. Large aperture optical element wavefront gradient controlled by computer numerical controlled polishing[J]. Optics and precision engineering, 2019, 27(7): 1473-1480.
DOI：

Jin-yong HUANG, Heng ZHAO, Qing HU, et al. Large aperture optical element wavefront gradient controlled by computer numerical controlled polishing[J]. Optics and precision engineering, 2019, 27(7): 1473-1480. DOI： 10.3788/OPE.20192707.1473.

摘要

针对改善光学元件的波前梯度均方根指标，在总结面形精度及面形分布对波前梯度指标影响规律的基础上，提出了基于匀滑面形拟合加工的方法，给出了该方法的基本思想和工作流程。首先，对原始面形数据进行扫描计算，标记波前突变数据。然后，采用NURBS拟合算法重构相邻面形突变点之间的数据，生成用于指导加工的面形数据。最后，根据待加工面形数据选择相应参数进行面形加工。采用多件610 mm×440 mm口径K9材料平面反射镜进行实验验证。实验结果表明，使用该方法进行数控加工，在2~3个加工周期内可使波前梯度均方根指标从11 nm/cm收敛至7.7 nm/cm以内，且面形几乎保持不变。

Abstract

To improve the Graphical Representation of Model Spaces (GRMS) index of optical elements

a new polishing method based on smoothing surface shape by fitting was proposed after the rules of the effects of surface shape precision and distribution on the wavefront gradient index were summarized. The fundamentals and workflow of this method were then presented. First

the surface shape discontinuity was determinedby scanning and computing the original surface shape data. Then

the new surface shape data used in guiding the processing were generated using the non-uniform rational B-spline fitting algorithm and the data between the neighbor discontinuities was reconstucted. Finally

appropriate processing parameters were established based on the generated surface shape data. An experimental study was conducted on K9 material plane mirrors of 610 × 440 mm

and results showed that the proposed method can reduce the GRMS from 11 nm/cm to less than 7.7 nm/cm in two polishing cycles while maintaining a high surface shape precision.

关键词

Keywords

references

BAISDEN P A, ATHERTON L J, HAWLEY R A, et al .. Large optics for the national ignition facility[J]. Fusion Science and Technology , 2016, 69(1): 295-351.

邵建达, 戴亚平, 许乔.惯性约束聚变激光驱动装置用光学元器件的研究进展[J].光学精密工程, 2016, 24(12): 2889-2895.

SHAO J D, DAI Y P, XU Q. Progress on optical components for ICF laser facility[J]. Opt . Precision Eng ., 2016, 24(12): 2889-2895. (in Chinese)

SPAECH M L, MANES K R, WIDMAYER C C, et al .. The National Ignition Facility wavefront requirements and optical architecture[R]. UCRL-JRNL-204518, 2004.

STOLZ C J. The national ignition facility: the path to a carbon-free energy future[J]. Philosophical Transactions of the Royal Society A : Mathematical , Physical and Engineering Sciences , 2012, 370(1973): 4115-4129.

柴立群, 许乔, 石琦凯, 等.光学元件波前梯度的数值计算方法[J].强激光与粒子束, 2005, 17(6): 841-844.

CHAI L Q, XU Q, SHI Q K, et al .. Numerical computation of wavefront gradient of optics[J]. High Power Laser & Particle Beams , 2005, 17(6): 841-844. (in Chinese)

曾学锋.光学表面频段误差对成像质量影响研究[D].北京: 中国科学院大学, 2014.

ZENG X F. Study on the Effect of Optical Surface Frequency Band Error in Imaging Quality [D]. Beijing: Graduate University of Chinese Academy of Sciences, 2014. (in Chinese)

李庆国.大口径光学抛物面面形检测技术的研究[D].西安: 西安工业大学, 2008.

LI Q G. Study on Test of Large Aperture Parabola Mirror [D]. Xi'an: Xi`an Technological University, 2008. (in Chinese)

王佳.基于可控柔度磨盘的中高频误差抑制研究[D].北京: 中国科学院大学, 2015.

WANG J. The Research of Restraining Middle and High Spatial Frequency Errors Based on Controllable Compliant Tool [D]. Beijing: University of Chinese Academy of Sciences, 2015. (in Chinese)

李强, 席光, 王尚锦. NURBS曲线插值的实现方法与探讨[J].计算机工程与应用, 1999, 35(7): 24-26.

LI Q, XI G, WANG SH J. The realization of NURBS curve interpolation and its exploration[J]. Computer Engineering and Applications , 1999, 35(7): 24-26. (in Chinese)

侯晶, 王洪祥, 陈贤华, 等.大口径平面光学元件的磁流变加工[J].光学精密工程, 2016, 24(12): 3054-3060.

HOU J, WANG H X, CHEN X H, et al .. Magnetorheological processing for large aperture plane optical elements[J]. Opt . Precision Eng ., 2016, 24(12): 3054-3060. (in Chinese)

LI L X, ZHENG L G, DENG W J, et al .. Optimized dwell time algorithm in magnetorheological finishing[J]. The International Journal of Advanced Manufacturing Technology , 2015, 81(5/6/7/8): 833-841.

颜浩, 唐才学, 罗子健, 等.平面光学元件中频误差的磁流变加工控制[J].光学精密工程, 2016, 24(12): 3076-3082.

YAN H, TANG C X, LUO Z J, et al .. Control of magnetorheological finishing on mid-spatial frequency error of flat optics[J]. Opt . Precision Eng ., 2016, 24(12): 3076-3082. (in Chinese)

PRESTON F W. The theory and design of plate glass polishing machines[J]. J . Soc . Glass Technol ., 1927, 11:214-256.

KIM D W, BURGE J H. Rigid conformal polishing tool using non-linear visco-elastic effect[J]. Optics Express , 2010, 18(3): 2242-2257.

TAKIZAWA K, BEAUCAMP A. Comparison of tool feed influence in CNC polishing between a novel circular-random path and other pseudo-random paths[J]. Optics Express , 2017, 25(19): 22411-22413.

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Large aperture optical element’s wavefront gradient controlled by CNC polishing

Application of metasurfaces in three-dimensonal imaging and display

Ultra-precision optical manufacture and laser performance of Yb:LuScO₃ crystal

Motion-precision control in bonnet-polishing

Manufacture of SiC off-axis aspheric mirrors by double-swing method

Related Author

HUANG Jinyong ZHAO Heng HU Qing GAO Xuhua

Yueqiang HU

Huigao DUAN

Hanbin CHI

Xue-ke XU

Feng-feng SHEN

Wen-lan GAO

Hao-hai YU

Related Institution

Chengdu Fine Optical Engineering Research Center

National Engineering Research Center for High-Efficiency Grinding， College of Mechanical and Vehicle Engineering， Hunan University

Advanced Manufacturing Laboratory of Micro-Nano Optical Devices， Shenzhen Research Institute， Hunan University

Innovation Institute of Hunan University in the Greater Bay Area

Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰