Application and novel angle measurement error compensation method of circular gratings

Lian-dong YU; Wen-hui BAO; Hui-ning ZHAO; Hua-kun JIA; Run ZHANG

doi:10.3788/OPE.20192708.1719

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Application and novel angle measurement error compensation method of circular gratings

Modern Applied Optics | 更新时间：2020-08-13

- Application and novel angle measurement error compensation method of circular gratings
- Optics and Precision Engineering Vol. 27, Issue 8, Pages: 1719-1726(2019)
- 作者机构：
  
  合肥工业大学仪器科学与光电工程学院，安徽合肥 230009
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20192708.1719
  CLC： TB922
- Received：20 March 2019，
  
  Accepted：10 April 2019，
  
  Published：15 August 2019
- 稿件说明：
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Lian-dong YU, Wen-hui BAO, Hui-ning ZHAO, et al. Application and novel angle measurement error compensation method of circular gratings[J]. Optics and precision engineering, 2019, 27(8): 1719-1726.
DOI：

Lian-dong YU, Wen-hui BAO, Hui-ning ZHAO, et al. Application and novel angle measurement error compensation method of circular gratings[J]. Optics and precision engineering, 2019, 27(8): 1719-1726. DOI： 10.3788/OPE.20192708.1719.

摘要

在实际工业应用中，环境温度变化是便携关节式坐标测量机中旋转轴系测角精度的主要误差源。为了消除环境温度对旋转轴系测角精度的影响，本文提出了一种新型圆光栅测角误差补偿方法，即建立含有环境温度影响因子的圆光栅测角误差补偿模型。利用谐波方法建立在特定温度下的圆光栅测角误差补偿模型，利用多项式方法建立谐波系数与环境温度之间的函数关系。最后，以14 ℃下的实验数据为验证数据，分别代入到传统谐波误差补偿模型和本文提出的模型中。实验结果表明，相对于传统谐波误差补偿模型，使用本文提出的模型补偿后圆光栅的测角精度提高4倍左右，修正后的残差峰峰值在2″以内，能够有效地补偿10~40 ℃下圆光栅的测角误差。

Abstract

In practical industrial applications

ambient temperature change is the main source of error in the angular accuracy of the rotating shaft in Portable Articulated Coordinate Measurement Instruments Machines (PACMM). To eliminate this error

this paper proposes a new method to establish a circular grating angle measurement error compensation model with ambient temperature influence factors. First

the harmonic method is used to establish the compensation model of angle measurement error of circular gratings at a specific temperature. Second

the polynomial method is used to establish the functional relationship between the harmonic coefficient and the ambient temperature. Finally

the experimental data at 14 ℃ is used as the verification data that are substituted into both the traditional harmonic error compensation model and the model proposed by this paper. The experimental results show that compared with the traditional harmonic error compensation model

the accuracy of the compensation model proposed by this paper is improved by a factor of approximately four

and the corrected residual peak value is within 2″; this value can effectively compensate the angular error of the circular grating at 10 to 40 ℃.

关键词

Keywords

references

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