Influence and monitoring of yaw angle error of grating pair in transmission grating displacement sensor

Xiao-yi WANG; Lu-qing HU; Xian-qing LEI; Xiao-lin ZUO; Yong-jun WANG; Yang-yang GUO

doi:10.3788/OPE.20192710.2154

您当前的位置：

首页 >

文章列表页 >

Influence and monitoring of yaw angle error of grating pair in transmission grating displacement sensor

Modern Applied Optics | 更新时间：2020-08-13

- Influence and monitoring of yaw angle error of grating pair in transmission grating displacement sensor
- Optics and Precision Engineering Vol. 27, Issue 10, Pages: 2154-2164(2019)
- 作者机构：
  
  河南科技大学机电工程学院，河南洛阳 471003
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20192710.2154
  CLC： TP212
- Received：27 December 2018，
  
  Accepted：18 February 2019，
  
  Published：15 October 2019
- 稿件说明：
移动端阅览
Xiao-yi WANG, Lu-qing HU, Xian-qing LEI, et al. Influence and monitoring of yaw angle error of grating pair in transmission grating displacement sensor[J]. Optics and precision engineering, 2019, 27(10): 2154-2164.
DOI：

Xiao-yi WANG, Lu-qing HU, Xian-qing LEI, et al. Influence and monitoring of yaw angle error of grating pair in transmission grating displacement sensor[J]. Optics and precision engineering, 2019, 27(10): 2154-2164. DOI： 10.3788/OPE.20192710.2154.

摘要

透射光栅副的Yaw向夹角误差是影响光栅信号质量的重要因素，但现有的数学模型不能精确反映Yaw向夹角误差对光栅信号质量的影响规律。建立了同时考虑光电池性能参数、光电池安装位置、指示光栅与标尺光栅夹角误差等因素的光栅信号利萨如图形的数学模型，研究了光栅副Yaw向夹角误差对利萨如图形形状的影响机理，发现利萨如图形的离心率和倾斜程度与光栅副Yaw向夹角误差之间存在规律性的数学关系，通过实测实验验证了该关系。数值仿真与实验测量得到的利萨如图形的离心率和倾角的相对误差分别小于1%和3%，验证了数学模型的正确性和有效性。建立的数学模型和数值关系为光栅生产中的信号质量调整和运动部件(读数头)Yaw向运动误差实时监测和误差修正提供了理论基础。

Abstract

The yaw angle error of a transmission grating pair is an important factor affecting the quality of the grating signal

but the existing mathematical model cannot accurately reflect the influence of the yaw angle error on the quality of grating signal. A mathematical model of the Lissajous figure of the grating signal was established in this paper

considering factors such as the performance parameters of a photocell

installation position of the photocell

and the angle error between the indicator and scale gratings. The influence mechanism of the angle error in the yaw axis of the grating pair on the shape of a Lissajous figure was studied. We found regular mathematical relationships among the eccentricity

tilt of the Lissajous figure

and angle error in the yaw axis of grating pairs. The relationship is verified experimentally. The relative error of the eccentricity and tilt of the Lissajous figure obtained by numerical simulation and experimental measurement are less than 1% and 3%

respectively

which verifies the correctness and effectiveness of the proposed mathematical model. The established mathematical model and the numerical relationships found provide a theoretical basis for signal quality adjustment in grating production and real-time monitoring of yaw axis motion errors of moving parts (reading heads) in use.

关键词

Keywords

references

石照耀, 尚岳, 王笑一, 等.长光栅传感器动态误差检测系统设计[J].北京工业大学学报, 2016, 42(3):321-328.

SHI Z Y, SHANG Y, WANG X Y, et al.. Design of the dynamic error measurement system for linear-encoders[J]. Journal of Beijing Polytechnic University , 2016, 42(3):321-328.(in Chinese)

王敏, 王笑一.长光栅传感器动态特性试验台的设计[J].机电工程, 2013, 30(5):549-551, 561.

WANG M, WANG X Y. Design of dynamic performance detector system for linear grating sensor[J]. Mechanical & Electrical Engineering Magazine , 2013, 30(5):549-551, 561.(in Chinese)

朱帆, 吴易明, 刘长春.四读头法消除码盘偏心和振动对叠栅条纹相位测量的影响[J].光学学报, 2011, 31(4):138-144.

ZHU F, WU Y M, LIU CH C. Eliminating influence of grating encoder's eccentricity and vibration to moiré fringes signal by four reading heads[J]. Acta Optica Sinica , 2011, 31(4):138-144.(in Chinese)

陈勇, 陈慧宝, 孙桂清, 等.光栅莫尔条纹信号质量的提高及其采集方法[J].上海大学学报:自然科学版, 2004, 10(2):129-132.

CHEN Y, CHEN H B, SUN G Q, et al .. Improving quality of grating moiré fringe and a collection method[J]. Journal of Shanghai University: Natural Science , 2004, 10(2):129-132.(in Chinese)

吴宏圣, 曾琪峰, 乔栋, 等.提高光栅莫尔条纹信号质量的滤波方法[J].光学精密工程, 2011, 19(8):1944-1949.

WU H SH, ZENG Q F, QIAO D, et al .. Filtering method of improving quality of grating moiré fringe[J]. Opt. Precision Eng. , 2011, 19(8):1944-1949.(in Chinese)

TAN K K, ZHOU H X, TONG H L. New interpolation method for quadrature encoder signals[J]. IEEE Transactions on Instrumentation & Measurement , 2002, 51(5):1073-1079.

ULU E, ULU N G, CAKMAKCI M. Adaptive correction and look-up table based interpolation of quadrature encoder signals[C]. Asme Dynamic Systems & Control Conference Joint with the Jsme Motion & Vibration Conference , 2012: 543-552.

李晓天, 巴音贺希格, 齐向东, 等.机械刻划光栅的刻线弯曲与位置误差对平面光栅性能影响及其修正方法[J].中国激光, 2013, 40(3):227-234.

LI X T, BAYANHESHIG, QI X D, et al .. Influence and revising method of machine-ruling grating line's curve error, location error on plane grating' performance[J]. Chinese Journal of Lasers , 2013, 40(3):227-234.(in Chinese)

朱革, 张超, 付敏, 等.交变光场时空耦合型位移测量系统的研制[J].光学精密工程, 2017, 25(8):2011-2022.

ZHU G, ZHANG CH, FU M, et al .. Developement of alternating light field space-time coupling type displacement measuring system[J]. Opt. Precision Eng. , 2017, 25(8):2011-2022.(in Chinese)

冯超鹏, 祝连庆, 潘志康, 等.一种新的圆光栅偏心参数自标定方法[J].仪器仪表学报, 2016, 37(11):2459-2464.

FENG CH P, ZHU L Q, PAN Z K, et al .. New self-calibration method of circular grating eccentric parameters[J]. Chinese Journal of Scientific Instrument , 2016, 37(11):2459-2464.(in Chinese)

陈晓怀, 杜国山, 程真英.光栅测量系统的误差研究[J].电子测量与仪器学报, 2012, 26(3):187-191.

CHEN X H, DU G SH, CHENG ZH Y. Research on dynamic error of grating measurement system[J]. Journal of Electronic Measurement and Instrument , 2012, 26(3):187-191.(in Chinese)

王福全, 王珏, 谢志江, 等.精密转台角分度误差补偿[J].光学精密工程, 2017, 25(8):2165-2172.

WANG F Q, WANG J, XIE ZH J, et al .. Compensation of angular indexing error for precision turntable[J]. Opt. Precision Eng. , 2017, 25(8):2165-2172.(in Chinese)

卢新然, 宋路, 万秋华.红外光源参数对光电编码器信号的影响[J].红外与激光工程, 2017, 46(9):224-229.

LU X R, SONG L, WAN Q H. Effect of infrared light source parameters on photoelectric encoder[J]. Infrared & Laser Engineering , 2017, 46(9):224-229.(in Chinese)

郭雨梅, 卢弘博.光栅莫尔条纹信号非正弦性误差修正[J].沈阳工业大学学报, 2015, 37(6):679-683.

GUO Y M, LU H B. Non-sinusoidal error correction for grating Moiré fringe signal[J]. Journal of Shenyang University of Technology , 2015, 37(6):679-683.(in Chinese)

吕孟军, 郭琪, 吕印晓.莫尔条纹信号相位误差补偿[J].光学精密工程, 2009, 17(7):1694-1700.

LÜ M J, GUO Q, LV Y X. Signal phase error compensation of Moiré fringe[J]. Opt. Precision Eng. , 2009, 17(7):1694-1700.(in Chinese)

高旭, 万秋华, 赵长海, 等.莫尔条纹光电信号正交性偏差的实时补偿[J].光学精密工程, 2014, 22(1):213-219.

GAO X, WAN Q H, ZHAO CH H, et al .. Real-time compensation of orthogonality deviation for Moiré fringe photoelectric signal[J]. Opt. Precision Eng. , 2014, 22(1): 213-219.(in Chinese)

王春海, 张国雄.不依赖于长度基准的光栅细分精度的评定方法[J].计量学报, 1995(1):6-11.

WANG CH H, ZHANG G X. A method for determining the interpolation error of grating signals without length reference[J]. Acta Metrologica Sinica , 1995(1):6-11.(in Chinese)

艾晨光, 褚明, 孙汉旭, 等.基准圆光栅偏心检测及测角误差补偿[J].光学精密工程, 2012, 20(11):2479-2484.

AI CH G, CHU M, SUN H X, et al .. Eccentric testing of benchmark circular grating and compensation of angular error[J]. Opt. Precision Eng. , 2012, 20(11):2479-2484.(in Chinese)

张善锺.计量光栅技术[M].北京:机械工业出版社, 1985.

ZHANG SH ZH. Measuring Grating Technique [M]. Beijing: China Machine Press, 1985.(in Chinese)

雷贤卿, 张亚东, 马文锁, 等.轴承滚子凸度轮廓的最小二乘拟合与误差评定[J].光学精密工程, 2018, 26(8):2039-2047.

LEI X Q, ZHANG Y D, MA W S, et al .. Least square fitting and error evaluation of the convex contour of bearing roller[J]. Opt. Precision Eng. , 2018, 26(8):2039-2047.(in Chinese)

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Research on factors influencing the pointing accuracy of large telescopes and the correction model

Calibration and correction of geometric errors in laser tracker

Correction of probe alignment error for ZC1 worm gear profile measurement

Model establishment and error correction of FMCW lidar

Correction method for angle measurement error of eccentric encoder with double read-heads installed non-diametrically opposite

Related Author

CAO Yuyan

WANG Jianli

ZHANG Jin

XIA Haojie

CHEN Baogang

CUI Chengjun

WANG Guoming

PAN Yingling

Related Institution

Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences

Hefei University of technology，College of Instrument Science and Optoelectronic Engineering

University of Chinese Academy of Sciences

Institute of Microelectronics of the Chinese Academy of Sciences

Beijing Engineering Research Center of Precision Measurement Technology and Instruments， Faculty of Materials and Manufacturing， Beijing University of Technology

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰