Guo-zhen CHEN, Si-qiang XU, Pin-kuan LIU. Structural design and bandwidth characteristic of a fast steering mirror with large travel range[J]. Optics and precision engineering, 2020, 28(1): 90-102.
DOI:
Guo-zhen CHEN, Si-qiang XU, Pin-kuan LIU. Structural design and bandwidth characteristic of a fast steering mirror with large travel range[J]. Optics and precision engineering, 2020, 28(1): 90-102. DOI: 10.3788/OPE.20202801.0090.
Structural design and bandwidth characteristic of a fast steering mirror with large travel range
For a Fast-Steering Mirror (FSM) driven by Voice Coil Motors (VCMs)
the coil of the VCM touches the stator as the FSM achieves a broad range of motion. A novel FSM was developed to prevent the occurrence of undesired contact between the coil and stator. A compliant decoupling mechanism was designed to minimize the transverse displacement of the coil of the VCM. Moreover
for the FSM with a broad range of motion
the force-displacement relationship was nonlinear
which resulted in variable resonant frequencies at different motion positions. We developed a variable notch filter to eliminate the variable resonant modes
and a Proportional-Integral(PI) controller was designed to achieve closed-loop control. Compared to the fixed notch filter
the resonant frequencies of the variable notch filter were a function of the motion positions of the FSM. The bandwidth of the FSM was studied by finite-element analysis and experiments using fixed and variable notch filters. According to the experimental results
as a fixed notch filter was applied
the bandwidth of the FSM varied in different motion positions. When the motion position is less than 15.2 mrad
the bandwidths of the FSM along the
θ
x
and
θ
y
axes are approximately 95 Hz and 110 Hz
respectively; when the motion position is 18.2 mrad
the bandwidths of the
θ
x
and
θ
y
axes drop to 47.92 Hz and 57.1 Hz
respectively. As a variable notch filter is applied
the bandwidths of the FSM along the
θ
x
and
θ
y
axes are stable at 95 Hz and 110 Hz
respectively; this result illustrates the need and effectiveness of applying a variable notch filter in an FSM system with a broad range of motion.
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references
SUN C, DING Y, WANG D, et al .. Backscanning step and stare imaging system with high frame rate and wide coverage[J]. Applied Optics , 2015, 54(16):4960-4965.
AIGOUY G, BENOIT K, BETSCH E, et al .. Development of magnetic fast steering mirror prototype for optical pointing applications[C]. 16th International Conference on New Actuators, Germany: VDE , 2018: 559-562.
ZHAO L, JI M, WANG J, et al .. Design and simulation of fast steering mirrors connected by universal flexure hinges[J]. Infrared and Laser Engineering , 2019, 48(2):164-170. (in Chinese)
XU X X, ZHANG G M, CHEN CH B. Design and performance test of the fast-steering mirror with flexure hinge used in vehicle track-launch system[J]. Optoelectronics Letters , 2019, 15(3):179-184.
YANG M, DU ZH J, SUN L N, et al .. Optimal design, modeling and control of a long stroke 3-PRR compliant parallel manipulator with variable thickness flexure pivots[J]. Robotics and Computer Integrated Manufacturing , 2019, 60:23-33.
LIU L, LI Q, YUN H, et al .. Composite modeling and parameter identification of broad bandwidth hysteretic dynamics in piezoelectric fast steering platform[J]. Mechanical Systems and Signal Processing , 2019, 121:97-111.
WANG G, WANG Y, ZHOU H, et al .. Comprehensive approach to modeling and identification of a two-axis piezoelectric fast steering mirror system based on multi-component analysis and synthesis[J]. Mechanical Systems and Signal Processing , 2019, 127:50-67.
Shubao S, Zheng T, Siyang S, et al .. Two-degrees-of-freedom piezo-driven fast steering mirror with cross-axis decoupling capability[J]. Review of Scientific Instruments , 2018, 89(5):055003.
ZHAO L, JI M, WANG M X, et al .. Influence of driving forms on servo bandwidth in fast steering mirror[J]. Opt. Precision Eng ., 2019, 27(2):393-401.(in Chinese)
LI X T, ZHANG X P, MAO D P, et al .. Adaptive robust control over high-performance VCM-FSM[J]. Opt. Precision Eng ., 2017, 25(9):2428-2436.(in Chinese)
WU X, CHEN S, CHEN W, et al .. Large angle and high linearity two-dimensional laser scanner based on voice coil actuators[J]. Review of Scientific Instruments , 2011, 82(10):105103.
WU X, CHEN S, SHI B, et al .. High-powered voice coil actuator for fast steering mirror[J]. Optical Engineering , 2011, 50(2):023002.
WADIKHAYE S P, YONG Y K, BHIKKAJI B, et al .. Control of a piezoelectrically actuated high-speed serial-kinematic AFM nanopositioner[J]. Smart Materials and Structures , 2014, 23: 025030.
LING J, FENG Z, MING M, et al .. Damping controller design for nanopositioners: A hybrid reference model matching and virtual reference feedback tuning approach[J]. International Journal of Precision Engineering and Manufacturing , 2018, 19(1): 13-22.
VORBRINGER-DOROZHOVETS N, HAUSOTTE T, MANSKE E, et al .. Novel control scheme for a high-speed metrological scanning probe microscope[J]. Measurement Science and Technology , 2011, 22(9):094012.
GU G Y, ZHU L M. Motion control of piezoceramic actuators with creep, hysteresis and vibration compensation[J]. Sensors and Actuators A: Physical , 2013, 197: 76-87.
AWTAR S, SLOCUM A H, SEVINCER E. Characteristics of beam-based flexure modules[J]. Journal of Mechanical Design , 2007; 129(6): 625-639.
HAO G, LI H. Nonlinear analytical modeling and characteristic analysis of a class of compound multibeam parallelogram mechanisms[J]. Journal of Mechanisms and Robotics , 2015, 7(4):041016.