Effect of lapping load on self-conditioning performance of fixed agglomerated abrasive pad

Feng-li NIU; Yong-wei ZHU; Gong-ming SHEN; Zi-kun WANG; Ke-rong WANG

doi:10.3788/OPE.20202802.0372

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Effect of lapping load on self-conditioning performance of fixed agglomerated abrasive pad

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-07-16

- Effect of lapping load on self-conditioning performance of fixed agglomerated abrasive pad
- Optics and Precision Engineering Vol. 28, Issue 2, Pages: 372-381(2020)
- 作者机构：
  
  南京航空航天大学机电学院江苏省精密与微细制造技术重点实验室，江苏南京 210016
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20202802.0372
  CLC： TG73; TG74
- Received：08 August 2019，
  
  Revised：08 October 2019，
  
  Accepted：08 October 2019，
  
  Published：25 February 2020
- 稿件说明：
移动端阅览
Feng-li NIU, Yong-wei ZHU, Gong-ming SHEN, et al. Effect of lapping load on self-conditioning performance of fixed agglomerated abrasive pad[J]. Optics and precision engineering, 2020, 28(2): 372-381.
DOI：

Feng-li NIU, Yong-wei ZHU, Gong-ming SHEN, et al. Effect of lapping load on self-conditioning performance of fixed agglomerated abrasive pad[J]. Optics and precision engineering, 2020, 28(2): 372-381. DOI： 10.3788/OPE.20202802.0372.

摘要

固结磨料研磨过程中磨料的微破碎是实现固结磨料垫自修正特性的主要途径，研磨压力是影响磨粒微破碎的关键参数。选用单晶金刚石和聚集体金刚石作为磨粒制备固结磨料垫，在15 kPa压力下以石英玻璃为加工对象进行研磨实验，比较两者的材料去除率及加工稳定性；制备了4种陶瓷结合剂含量的聚集体金刚石，并制备成固结聚集体金刚石磨料垫，探索了不同压力下的固结聚集体金刚石磨料垫的自修正性能；分析了研磨后的工件表面粗糙度和表面微观形貌。结果表明：采用固结聚集体金刚石磨料垫，研磨后工件表面粗糙度低，去除效率稳定；在15~21 kPa的压力下，结合剂含量次高的聚集体金刚石研磨效率高，材料去除率达到8.94~12.43 μm/min，加工性能较稳定，研磨后的工件表面粗糙度

a在60 nm左右；在3.5~7 kPa压力下，结合剂含量次低的聚集体金刚石研磨性能较稳定，材料去除率在2.67~3.12 μm/min，研磨后的表面粗糙度

a在40 nm左右。高结合剂含量的聚集体金刚石磨粒更适合高研磨压力条件，而低结合剂的聚集体金刚石磨粒更适合于低研磨压力。

Abstract

During the process of fixed abrasive (FA) lapping

the micro-fracture of abrasives is the main approach to realize the self-conditioning process of the FA pad; the lapping load is one of the key parameters that affects it.The FA pads were prepared by using single diamond (SD) and agglomerated diamond (AD) abrasives. Marathon lapping tests were carried out

using quartz glass as the workpiece under a lapping load of 15 kPa. The material removal rate (MRR) and machining stability of the two FA pads were comparedtogether. Four kinds of AD abrasives with different concentrations of the ceramic binder were prepared and chosen as the abrasives to prepare the corresponding fixed AD abrasive (FADA)pads; their self-conditioning performance was evaluated under different lapping loads. The surface roughness(

a) and morphology of the lapped quartz glass were observed. The results show that: the

a of quartz glass lapped using the FADA pad is lower than of that lapped using fixed SD abrasive(FSDA) pad and that the former has a greater machining stability. Under a higher lapping load of 15-21 kPa

the FADA pad with the second highest ceramic binder concentration has the highest lapping efficiency; its MRR is 8.94-12.43 μm/min and

a is approximately 60 nm. Under a lower load of 3.5-7 kPa

the FADA pad with the second lowest ceramic binder concentration is the most stable; its MRR is 2.67-3.12 μm/min; the

a is approximately 40 nm. AD abrasive with a high ceramic binder concentration is more suitable as the abrasive for a FA pad in high-load applications

while that with a low concentration is more suitable for low-load applications.

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Keywords

references

朱永伟 , 王军 , 李军 , 等 . 固结磨料抛光垫抛光硅片的探索研究 . 中国机械工程 , 2009 . 20 ( 6 ): 723 - 727, 732 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjxgc200906020 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjxgc200906020 .

Y W ZHU , J WANG , J LI , 等 . Research on the polishing of silicon wafer by fixed abrasive pad . China Mechanical Engineering , 2009 . 20 ( 6 ): 723 - 727, 732 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjxgc200906020 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjxgc200906020 .

H KIM , B PARK , S LEE , 等 . Self-conditioning fixed abrasive pad in CMP . Journal of the Electrochemical Society , 2004 . 151 ( 12 ): G858 - G862 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=3414171c9f9761c7fd712484f819b090 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=3414171c9f9761c7fd712484f819b090 .

P VAN DER VELDEN . Chemical mechanical polishing with fixed abrasives using different subpads to optimize wafer uniformity . Microelectronic Engineering , 1999 . 50 ( 1 ): 41 - 46 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=5a1a2bfdd21e3bf864a372c76e6bdcfd http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=5a1a2bfdd21e3bf864a372c76e6bdcfd .

N N ZHU , Y W ZHU , NX JU , 等 . Modeling and validation of indentation depth of abrasive grain into lithium niobate wafer by fixed-abrasive lapping . Transactions of Nanjing University of Aeronautics and Astronautics , 2018 . 34 ( 1 ): 97 - 104 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=njhkhtdxxb-e201701014 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=njhkhtdxxb-e201701014 .

林魁 , 朱永伟 , 李军 , 等 . 金刚石固结磨料研磨K9玻璃的研究 . 硅酸盐通报 , 2010 . 29 ( 1 ): 6 - 11 . http://d.old.wanfangdata.com.cn/Periodical/gsytb201001002 http://d.old.wanfangdata.com.cn/Periodical/gsytb201001002 .

K LIN , Y W ZHU , J LI , 等 . Study on lapping of K9 glass by fixed abrasive pad . Bulletin of the Chinese Ceramic Society , 2010 . 29 ( 1 ): 6 - 11 . http://d.old.wanfangdata.com.cn/Periodical/gsytb201001002 http://d.old.wanfangdata.com.cn/Periodical/gsytb201001002 .

王占奎 , 朱永伟 , 朱琳 , 等 . 三乙醇胺在镁铝尖晶石固结磨料研磨中的作用 . 光学精密工程 , 2015 . 23 ( 4 ): 1034 - 1043 . http://www.eope.net/CN/abstract/abstract15768.shtml http://www.eope.net/CN/abstract/abstract15768.shtml .

ZH K WANG , Y W ZHU , L ZHU , 等 . Effect of triethanolamine in lapping spinel using fixed abrasive pad . Opt. Precision Eng. , 2015 . 23 ( 4 ): 1034 - 1043 . http://www.eope.net/CN/abstract/abstract15768.shtml http://www.eope.net/CN/abstract/abstract15768.shtml .

J Y CHOI , H D JEONG . A study on polishing of molds using hydrophilic fixed abrasive pad . International Journal of Machine Tools & Manufacture , 2004 . 44 ( 11 ): 1163 - 1169 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=13b40d20bb2c1d4ac46c549548ed1a6f http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=13b40d20bb2c1d4ac46c549548ed1a6f .

H Y KIM , H KIM , H JEONG , 等 . Self-conditioning of encapsulated abrasive pad in chemical mechanical polishing . Journal of Materials Processing Technology , 2003 . 142 ( 3 ): 614 - 618 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=140af2537350899f22ae756d9a730699 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=140af2537350899f22ae756d9a730699 .

徐俊 , 朱永伟 , 朱楠楠 , 等 . 亲水性固结磨料研磨垫自修整机理探索 . 纳米技术与精密工程 , 2014 . 12 ( 6 ): 429 - 434 . http://d.old.wanfangdata.com.cn/Periodical/nmjsyjmgc201406007 http://d.old.wanfangdata.com.cn/Periodical/nmjsyjmgc201406007 .

J XU , Y W ZHU , N N ZHU , 等 . Self-conditioning mechanism of hydrophilic fixed abrasive pad . Nanotechnology and Precision Engineering , 2014 . 12 ( 6 ): 429 - 434 . http://d.old.wanfangdata.com.cn/Periodical/nmjsyjmgc201406007 http://d.old.wanfangdata.com.cn/Periodical/nmjsyjmgc201406007 .

王子琨 , 朱永伟 , 金振弘 , 等 . 乙醇浓度对亲水性固结磨料垫自修整特性的影响 . 光学精密工程 , 2018 . 26 ( 4 ): 843 - 849 . http://www.eope.net/CN/abstract/abstract17559.shtml http://www.eope.net/CN/abstract/abstract17559.shtml .

Z K WANG , Y W ZHU , ZH H JIN , 等 . Effect of ethanol solution on self-condition property of hydrophilic fixed abrasive pad . Opt. Precision Eng. , 2018 . 26 ( 4 ): 843 - 849 . http://www.eope.net/CN/abstract/abstract17559.shtml http://www.eope.net/CN/abstract/abstract17559.shtml .

J LI , J D HUANG , L XIA , 等 . Effect of chemical additive on fixed abrasive pad self-conditioning in CMP . The International Journal of Advanced Manufacturing Technology , 2017 . 88 107 - 113 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=114db7025e493524a7dd453c03fa8264 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=114db7025e493524a7dd453c03fa8264 .

J LI , Y K TANG , C X HUA , 等 . Effect of process parameters on fixed abrasive pad self-conditioning in micro/nano machining . Integrated Ferroelectrics , 2017 . 182 ( 1 ): 53 - 64 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=10.1080/10584587.2017.1352387 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=10.1080/10584587.2017.1352387 .

SUNARTO , ICHIDAY . Creep feed profile grinding of Ni-based superalloys with ultrafine-polycrystalline cBN abrasive grits . Precision Engineering , 2001 . 25 ( 4 ): 274 - 283 . http://d.old.wanfangdata.com.cn/NSTLQK/10.1016-S0141-6359(01)00078-2/ http://d.old.wanfangdata.com.cn/NSTLQK/10.1016-S0141-6359(01)00078-2/ .

Y J ZHU , W F DING , Z W RAO , 等 . Micro-fracture mechanism of polycrystalline CBN grain during single grain scratching tests based on fractal dimension analysis . Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology , 2019 . 59 26 - 36 . http://cn.bing.com/academic/profile?id=b41d96a27f3819fb5601b3403c1f3129&encoded=0&v=paper_preview&mkt=zh-cn http://cn.bing.com/academic/profile?id=b41d96a27f3819fb5601b3403c1f3129&encoded=0&v=paper_preview&mkt=zh-cn .

X HUANG , W F DING , Y J ZHU , 等 . Influence of microstructure and grinding load on the bulk toughness and fracture behavior of PCBN abrasive grains . The International Journal of Advanced Manufacturing Technology , 2018 . 94 ( 9/10/11/12 ): 4519 - 4530 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=4bdc5e5698a1af8b45d96eb9002386c4 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=4bdc5e5698a1af8b45d96eb9002386c4 .

王加顺 , 朱永伟 , 徐胜 , 等 . 不同研磨阶段金刚石磨粒表面覆镍量的优化 . 人工晶体学报 , 2015 . 44 ( 1 ): 13 - 18 . http://d.old.wanfangdata.com.cn/Periodical/rgjtxb98201501003 http://d.old.wanfangdata.com.cn/Periodical/rgjtxb98201501003 .

J SH WANG , Y W ZHU , SH XU , 等 . Optimization of nickel coating on diamond abrasive particle at different lapping stages . Journal of Synthetic Crystals , 2015 . 44 ( 1 ): 13 - 18 . http://d.old.wanfangdata.com.cn/Periodical/rgjtxb98201501003 http://d.old.wanfangdata.com.cn/Periodical/rgjtxb98201501003 .

徐胜 , 朱永伟 , 王加顺 , 等 . 金刚石覆镍量对固着磨料研磨蓝宝石性能的影响 . 硅酸盐学报 , 2015 . 43 ( 4 ): 445 - 450 . http://d.old.wanfangdata.com.cn/Periodical/gsyxb201504012 http://d.old.wanfangdata.com.cn/Periodical/gsyxb201504012 .

SH XU , Y W ZHU , J SH WANG , 等 . Effect of diamond coating rate on sapphire lapping performance by fixed abrasive pad . Journal of the Chinese Ceramic Society , 2015 . 43 ( 4 ): 445 - 450 . http://d.old.wanfangdata.com.cn/Periodical/gsyxb201504012 http://d.old.wanfangdata.com.cn/Periodical/gsyxb201504012 .

朱永伟 , 沈琦 , 王子琨 , 等 . 多晶金刚石固结磨料研磨垫精研石英玻璃的性能探索 . 红外与激光工程 , 2016 . 45 ( 10 ): 26 - 31 . http://d.old.wanfangdata.com.cn/Periodical/hwyjggc201610003 http://d.old.wanfangdata.com.cn/Periodical/hwyjggc201610003 .

Y W ZHU , Q SHEN , Z K WANG , 等 . Lapping performance on quartz glass of fixed abrasive pad embedded with multi-grain diamond grits . Infrared and Laser Engineering , 2016 . 45 ( 10 ): 26 - 31 . http://d.old.wanfangdata.com.cn/Periodical/hwyjggc201610003 http://d.old.wanfangdata.com.cn/Periodical/hwyjggc201610003 .

王建彬.固结磨料研磨蓝宝石工件的材料去除机理及工艺研究[D].南京: 南京航空航天大学, 2015. http://cdmd.cnki.com.cn/Article/CDMD-10287-1016752008.htm

WANG J B. Material RemovalMechanism and Process Research of Lapping Sapphire by Fixed Abrasive [D]. Nanjing: Nanjing University of Aeronautics and Astronautics, 2015.(in Chinese)

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