Design of flexure micro-gripper precision-driven by piezoceramics

Zhi-gang WU; Min CHEN

doi:10.3788/OPE.20202802.0398

您当前的位置：

首页 >

文章列表页 >

Design of flexure micro-gripper precision-driven by piezoceramics

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-07-16

- Design of flexure micro-gripper precision-driven by piezoceramics
- Optics and Precision Engineering Vol. 28, Issue 2, Pages: 398-404(2020)
- 作者机构：
  
  江西理工大学能源与机械工程学院，江西南昌 330013
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20202802.0398
  CLC： TP241.3; TH361
- Received：14 June 2019，
  
  Revised：08 August 2019，
  
  Accepted：08 August 2019，
  
  Published：25 February 2020
- 稿件说明：
移动端阅览
Zhi-gang WU, Min CHEN. Design of flexure micro-gripper precision-driven by piezoceramics[J]. Optics and precision engineering, 2020, 28(2): 398-404.
DOI：

Zhi-gang WU, Min CHEN. Design of flexure micro-gripper precision-driven by piezoceramics[J]. Optics and precision engineering, 2020, 28(2): 398-404. DOI： 10.3788/OPE.20202802.0398.

摘要

为了实现对微纳尺度下物件的精密夹持，建立了柔性微夹钳系统。并对该系统柔性夹钳设计、运动学、动力学和控制方法等进行研究。首先，利用柔性铰链设计方法设计了柔性微夹钳，利用伪刚体法建立了机械的伪刚体模型。接着，以伪刚体模型法建立了系统的运动学模型，即机械放大比和输入刚度等数学模型。然后，利用拉格朗日方法建立了系统的动力学方程，得出系统的自然振动频率。最后，通过ANSYS有限元方法对系统建立的模型进行了仿真分析和验证，此外，利用PID控制算法对微夹钳系统进行实验控制。实验结果表明：跟踪控制结果误差为2.4%；放大比为9.12倍。基本满足微纳尺度下的微夹持工作，其工作精度可达微米级别甚至纳米级别，符合设计要求。

Abstract

A flexible micro-gripper system was developed to realize the precision clamping of micro-or Nano-sized objects. The design

kinematics

dynamics

and control methods of the flexible micro-gripper were studied. First

a flexible micro-gripper was designed by using a flexure hinge design method

and a Pseudo Rigid Body (PRB) model was established by using a PRB method. Moreover

the kinematic models of the system

for example

the mechanical amplification ratio and input stiffness

were established using the PRB model. Furthermore

the dynamic equation of the system was established by the Lagrange method

and the natural vibration frequencies of the system were obtained. Finally

the ANSYS finite element method was used to simulate and verify the model of the system. Additionally

a PID control algorithm was used to control the micro-gripping system. The experimental results show that the tracking control error is 2.4%

and the magnification ratio is 9.12. The system performs the micro-clamping function on the micro-or Nano-scale

and its total precision can reach the micron level or Nano-level. The micro-gripper meets the design requirements in several studies.

关键词

Keywords

references

朱文兴 , 谢明珠 , 吴立珺 . 制造业服务化的影响因素及驱动路径研究 . 江西理工大学学报 , 2018 . 39 ( 6 ): 44 - 50 . http://d.old.wanfangdata.com.cn/Periodical/nfyjxyxb201806009 http://d.old.wanfangdata.com.cn/Periodical/nfyjxyxb201806009 .

W X ZHU , M ZH XIN , L J WU . Research on influence factors and driving path of servitization of manufacturing industry . Journal of Jiangxi University of Science and Technology , 2018 . 39 ( 6 ): 44 - 50 . http://d.old.wanfangdata.com.cn/Periodical/nfyjxyxb201806009 http://d.old.wanfangdata.com.cn/Periodical/nfyjxyxb201806009 .

祁超 , 谢馨 , 陈凌宇 , 等 . 精密转台S曲线轨迹规划及高精度控制 . 光学精密工程 , 2018 . 26 ( 12 ): 2971 - 2981 . http://www.eope.net/CN/abstract/abstract17853.shtml http://www.eope.net/CN/abstract/abstract17853.shtml .

CH QI , X XIE , L Y CHEN , 等 . S-curve trajectory planning and high-precision control of precision servo turntable . Opt. Precision Eng. , 2018 . 26 ( 12 ): 2971 - 2981 . http://www.eope.net/CN/abstract/abstract17853.shtml http://www.eope.net/CN/abstract/abstract17853.shtml .

崔玉国 , 王子宾 , 马剑强 , 等 . 四自由度压电微夹钳的设计 . 机械工程学报 , 2017 . 53 ( 23 ): 165 - 173 . http://d.old.wanfangdata.com.cn/Periodical/jxgcxb201723021 http://d.old.wanfangdata.com.cn/Periodical/jxgcxb201723021 .

Y G CUI , Z B WANG , J Q MA , 等 . Design of a 4-dof piezoelectric micro-gripper . Journal of Mechanical Engineering , 2017 . 53 ( 23 ): 165 - 173 . http://d.old.wanfangdata.com.cn/Periodical/jxgcxb201723021 http://d.old.wanfangdata.com.cn/Periodical/jxgcxb201723021 .

LIANG , M C , F J WANG , Y L TIAN , 等 . Grasping force hysteresis compensation of a piezoelectric-actuated wire clamp with a modified inverse prandtl-ishlinskii model . Review of Scientific Instruments , 2017 . 88 ( 11 ): 115101 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=c0ab3970bec8f892e30ba26b69c6a65e http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=c0ab3970bec8f892e30ba26b69c6a65e .

张泉 , 尹达一 , 张茜丹 . 压电执行器动态迟滞建模与LQG最优控制器设计 . 光学精密工程 , 2018 . 26 ( 11 ): 2744 - 2753 . http://www.eope.net/CN/abstract/abstract17828.shtml http://www.eope.net/CN/abstract/abstract17828.shtml .

Q ZHANG , D Y YIN , X D ZHANG . Dynamic hysteresis modeling and LQG optimal controller design of piezoelectric actuators . Opt. Precision Eng. , 2018 . 26 ( 11 ): 2744 - 2753 . http://www.eope.net/CN/abstract/abstract17828.shtml http://www.eope.net/CN/abstract/abstract17828.shtml .

侯晓丹 , 权诺 , 杨鹏飞 , 等 . 一种柔顺微夹钳机构的拓扑优化方法研究 . 太原科技大学学报 , 2018 . 39 ( 5 ): 369 - 373 . http://d.old.wanfangdata.com.cn/Periodical/tyzxjjxyxb201805008 http://d.old.wanfangdata.com.cn/Periodical/tyzxjjxyxb201805008 .

X D HOU , N QUAN , P F YANG , 等 . Study of a topological optimization method for a flexible micro-clamp mechanism . Journal of Taiyuan University of Science and Technology , 2018 . 39 ( 5 ): 369 - 373 . http://d.old.wanfangdata.com.cn/Periodical/tyzxjjxyxb201805008 http://d.old.wanfangdata.com.cn/Periodical/tyzxjjxyxb201805008 .

A THANGAVEL , R RENGASWAMY , P SUKUMAR . Design and material analysis for prototyping of four arm mechanical microgripper with self-locking and anti-slipping capability . Microsystem Technologies , 2018 . 25 ( 3 ): 851 - 860 . http://cn.bing.com/academic/profile?id=07e794f53ff4b79c1d6395ce7d8e5830&encoded=0&v=paper_preview&mkt=zh-cn http://cn.bing.com/academic/profile?id=07e794f53ff4b79c1d6395ce7d8e5830&encoded=0&v=paper_preview&mkt=zh-cn .

N L HO , T P DAO , H G LE , 等 . Optimal design of a compliant microgripper for assemble system of cell phone vibration motor using a hybrid approach of anfis and jaya . Arabian Journal for Science and Engineering , 2018 . 44 ( 2 ): 1205 - 1220 .

王跃宗 , 隆超 , 王军帅 , 等 . 柔性导线微夹持系统结构设计 . 北京工业大学学报 , 2018 . 44 ( 6 ): 831 - 836 . http://d.old.wanfangdata.com.cn/Periodical/bjgydxxb201806004 http://d.old.wanfangdata.com.cn/Periodical/bjgydxxb201806004 .

Y Z WANG , Z LONG , J S WANG , 等 . Design for a micro-gripping system applied in handling the flexible wires . Journal of Beijing University of Technology , 2018 . 44 ( 6 ): 831 - 836 . http://d.old.wanfangdata.com.cn/Periodical/bjgydxxb201806004 http://d.old.wanfangdata.com.cn/Periodical/bjgydxxb201806004 .

李耀 , 吴洪涛 , 杨小龙 , 等 . 圆弧柔性铰链的优化设计 . 光学精密工程 , 2018 . 26 ( 6 ): 1370 - 1379 . http://www.eope.net/CN/abstract/abstract17639.shtml http://www.eope.net/CN/abstract/abstract17639.shtml .

Y LI , H T WU , X L YANG , 等 . Optimization design of circular flexure hinges . Opt. Precision Eng. , 2018, . 26 ( 6 ): 1370 - 1379 . http://www.eope.net/CN/abstract/abstract17639.shtml http://www.eope.net/CN/abstract/abstract17639.shtml .

R JOSHI , A MITRA , S KANDHARKAR . Design and analysis of compliant micro-gripper using Pseudo Rigid Body Model (PRBM) . Materials Today: Proceedings , 2017 . 4 ( 2 ): 1701 - 1707 . http://cn.bing.com/academic/profile?id=de59db5ce7fd2ee34bd930533bda15e8&encoded=0&v=paper_preview&mkt=zh-cn http://cn.bing.com/academic/profile?id=de59db5ce7fd2ee34bd930533bda15e8&encoded=0&v=paper_preview&mkt=zh-cn .

N M ZUBIR , B SHIRINZADEH , Y L TIAN . New Design of piezoelectric driven compliant-based microgripper for micromanipulation . Mechanism & Machine Theory , 2009 . 44 ( 12 ): 2248 - 2264 . http://cn.bing.com/academic/profile?id=0faa4d1fd43253b94f2aeb2f85a123ce&encoded=0&v=paper_preview&mkt=zh-cn http://cn.bing.com/academic/profile?id=0faa4d1fd43253b94f2aeb2f85a123ce&encoded=0&v=paper_preview&mkt=zh-cn .

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Pointing stability control method for super stable satellite based on composite axis control

Realization of precise positioning of fiber positioning unit R mechanism based on Preisach model

Performance test of piezoelectric ceramic liquid phase modulator

Wide-temperature-range and low-loss piezoelectric and friction functional materials of ultrasonic motor

Double-foot piezoelectric linear motor with secondary lever and flexure hinge composite structure

Related Author

ZHAO Zijing

LIU Yanfu

ZHAO Hongchao

FAN Lei

YAN Yong

LI Zizheng

Shengliang GU

Jianping WANG

Related Institution

School of Advanced Manufacturing， Shezhen Campus of Sun Yat-sen University

School of Physics and Astronomy， Sun Yat-sen University

School of Engineering Science， University of Science and Technology of China

College of Electronic and Optical Engineering & College of Microelectronics， Nanjing University of Posts and Telecommunications

Shanghai Institute of Ceramics, Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰