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Fabrication and rotation driving of movable microstructures based on femtosecond laser
Micro/Nano Technology and Fine Mechanics | 更新时间：2023-04-18

    • Fabrication and rotation driving of movable microstructures based on femtosecond laser

    • Optics and Precision Engineering   Vol. 28, Issue 3, Pages: 584-590(2020)

    • DOI：10.3788/OPE.20202803.0584    

      CLC：

    • Received：18 December 2019，

      Accepted：15 January 2020，

      Published：15 March 2020

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  • Hong-wei YUAN, Sheng-long RAO, Dong WU, et al. Fabrication and rotation driving of movable microstructures based on femtosecond laser[J]. Optics and precision engineering, 2020, 28(3): 584-590. DOI： 10.3788/OPE.20202803.0584.

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