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Optimization of development process for fabrication of high aspect ratio gratings
Micro/Nano Technology and Fine Mechanics | 更新时间：2023-04-18

    • Optimization of development process for fabrication of high aspect ratio gratings

    • Optics and Precision Engineering   Vol. 28, Issue 3, Pages: 632-638(2020)

    • DOI：10.3788/OPE.20202803.0632    

      CLC：

    • Received：18 October 2019，

      Accepted：11 November 2019，

      Published：15 March 2020

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  • Yi WANG, Shuang-yue HOU, Ying XIONG, et al. Optimization of development process for fabrication of high aspect ratio gratings[J]. Optics and precision engineering, 2020, 28(3): 632-638. DOI： 10.3788/OPE.20202803.0632.

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