Full-field heterodyne short coherent topography measurement technology

Tong LV; Wen-xi ZHANG; Xiao-yu LV; Yang LI; Zhou WU; Xin-xin KONG

doi:10.3788/OPE.20202804.0800

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Full-field heterodyne short coherent topography measurement technology

Modern Applied Optics | 更新时间：2020-08-13

- Full-field heterodyne short coherent topography measurement technology
- Optics and Precision Engineering Vol. 28, Issue 4, Pages: 800-807(2020)
- 作者机构：
  
  1.中国科学院光电研究院计算光学成像技术重点实验室，北京 100094
  2.中国科学院大学光电学院，北京 100094
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20202804.0800
  CLC： P164
- Received：25 December 2019，
  
  Revised：31 January 2020，
  
  Accepted：31 January 2020，
  
  Published：15 April 2020
- 稿件说明：
移动端阅览
Tong LV, Wen-xi ZHANG, Xiao-yu LV, et al. Full-field heterodyne short coherent topography measurement technology[J]. Optics and precision engineering, 2020, 28(4): 800-807.
DOI：

Tong LV, Wen-xi ZHANG, Xiao-yu LV, et al. Full-field heterodyne short coherent topography measurement technology[J]. Optics and precision engineering, 2020, 28(4): 800-807. DOI： 10.3788/OPE.20202804.0800.

摘要

针对工业检测中对微米量级测量精度、秒级测量时间的检测需求，提出了全视场外差短相干形貌测量方案。本方案采用短相干光源，实现大步长测量，节约扫描时间；采用全视场外差技术，实现干涉轮廓的快速反演，在抑制振动、直流噪声对测量精度影响的同时，提高数据反演的效率。搭建了实验验证系统，对测量时间和测量精度进行了实验验证，结果表明，系统的探测时长小于10 s，测量精度优于2

m。后续经进一步优化设计，探测时间可小于5 s，探测精度优于微米量级。该方案具有测量速度较快和测量精度较高等优势，在对效率要求较高的工业检测领域具有一定的应用前景。

Abstract

To satisfy the requirements of micron-level measurement accuracy and second-level measurement time in industrial detection

this study proposes a full-field heterodyne short coherent topography measurement scheme. A light source with short coherence is developed to achieve long stride measurement and save scanning time. This study uses full-field heterodyne technology to achieve fast inversion of interference contours

and suppresses the effects of vibration and DC noise on measurement accuracy to improve the efficiency of data inversion. Furthermore

an experimental verification system was set up

and the detection time of the system was verified to be less than 10 s with measurement accuracy superior to 2

m. The measurement time achieved by the system could be improved to less than 5 s with micron-level measurement accuracy by further optimizing the design. Therefore

the proposed technology was verified to be capable of satisfying the measurement requirements in industrial detection with the advantages of faster measurement speed and higher measurement accuracy compared to existing methods

and has prospective applications in the field of highly efficient industrial detection.

关键词

Keywords

references

M CHANG , C HU , P LAM , 等 . High precision deformation measurement by digital phase shifting holographic interferometry . Applied Optics , 1985 . 24 ( 22 ): 3780 - 3783 . http://cn.bing.com/academic/profile?id=52fbeb3910603e7911bee958024271ff&encoded=0&v=paper_preview&mkt=zh-cn http://cn.bing.com/academic/profile?id=52fbeb3910603e7911bee958024271ff&encoded=0&v=paper_preview&mkt=zh-cn .

迟桂纯 , 周肇飞 , 周卫东 . 激光干涉轮廓测量技术的发展 . 现代科学仪器 , 1996 . ( 4 ): 33 - 35 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199600827483 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199600827483 .

G CH CHI , ZH F ZHOU , W D ZHOU . Development of laser interferometric profile measurement technology . Modern Scientific Instruments , 1996 . ( 4 ): 33 - 35 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199600827483 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199600827483 .

方吉光.三维微表面相移干涉术研究[D].杭州: 浙江大学, 2006.

FANG J G. Research on Three-dimensional Micro-surface Phase - shifting Interferometry [D]. Hangzhou: Zhejiang University, 2006. (in Chinese)

S H THIAN , W FENG , Y S WONG , 等 . Dimensional measurement of 3D microstruture based on white light interferometer . Journal of Physics: Conference Series , 2007 . 48 1435 - 1446 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=Open J-Gate000000712769 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=Open J-Gate000000712769 .

金鹭.基于GPU的表面形貌测量系统的研究[D].杭州: 浙江大学, 2011.

JIN L. Study on Surface Topography Measurement System Based on GPU [D]. Hangzhou: Zhejiang University, 2011.(in Chinese)

陈伯双.微观表面三维形貌检测系统的研究[D].哈尔滨: 哈尔滨工业大学, 2013.

CHEN B SH. Research of Microscopic Surface Three - dimensional Topography Detection System [D]. Harbin: Harbin Institute of Technology, 2013.(in Chinese)

B KIM , S KIM . Absolute interferometer for three-dimensional profile measurement of rough surfaces . Optics Letters , 2003 . 28 ( 7 ): 528 - 530 . http://d.old.wanfangdata.com.cn/NSTLQK/10.1364-OL.28.000528/ http://d.old.wanfangdata.com.cn/NSTLQK/10.1364-OL.28.000528/ .

D S MEHTA , S SAITO , H HINOSUGI , 等 . Spectral interference Mirau microscope with an acousto-optic tunable filter for three-dimensional surface profilometry . Applied Optics , 2003 . 42 ( 7 ): 1296 - 1305 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=e0b0663e341862c65efe1404c7fd1556 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=e0b0663e341862c65efe1404c7fd1556 .

常素萍.基于白光干涉轮廓尺寸与形貌非接触测量方法和系统[D].武汉: 华中科技大学, 2007.

CHANG S P. The Surface Shape and Profile Dimension Measurement Method and System Based on White-light Interferometric Technology [D]. Wuhan: Huazhong University of Science and Technology, 2007.(in Chinese)

郧建平.基于白光干涉的表面形貌接触和非接触两用测量系统的研究[D].武汉: 华中科技大学, 2008.

YUN J P. Research on Contact and Noncontact Hybrid Measurement System of Profile Based on White Light Interferometry [D]. Wuhan: Huazhong University of Science and Technology, 2008.(in Chinese)

李绍辉.超精密加工高反射曲面光学非接触三维形貌测量[D].天津: 天津大学, 2012.

LI SH H. Optical3D Shape Measurement of Ultra - precision Specular Surface [D]. Tianjin: Tianjin University, 2012.(in Chinese)

马国庆 , 刘丽 , 于正林 , 等 . 大型复杂曲面三维形貌测量及应用研究进展 . 中国光学 , 2019 . 12 ( 2 ): 214 - 228 . http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201902003 http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201902003 .

G Q MA , L LIU , ZH L YU , 等 . Application and development of three-dimensional profile measurement for large and complex surface . Chinese Optics , 2019 . 12 ( 2 ): 214 - 228 . http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201902003 http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201902003 .

刘淑杰 , 张元良 , 张洪潮 . 透明软质薄膜的表面形貌测量 . 中国光学 , 2014 . 7 ( 2 ): 326 - 331 . http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201402023 http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201402023 .

SH J LIU , Y L ZHANG , H CH ZHANG . Profile measurement of thin transparentsoft film surface . Chinese Optics , 2014 . 7 ( 2 ): 326 - 331 . http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201402023 http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201402023 .

何宝凤 , 魏翠娥 , 刘柄显 , 等 . 三维表面粗糙度的表征和应用 . 光学精密工程 , 2018 . 26 ( 8 ): 1994 - 2011 . http://www.eope.net/CN/abstract/abstract17719.shtml http://www.eope.net/CN/abstract/abstract17719.shtml .

B F HE , C E WEI , B X LIU , 等 . Three-dimensional surface roughness characterization and application . Opt. Precision Eng , 2018 . 26 ( 8 ): 1994 - 2011 . http://www.eope.net/CN/abstract/abstract17719.shtml http://www.eope.net/CN/abstract/abstract17719.shtml .

尚万祺 , 张文喜 , 伍洲 , 等 . 全视场外差干涉三维测量系统 . 光学精密工程 , 2019 . 27 ( 10 ): 2097 - 2104 . http://www.eope.net/CN/abstract/abstract17992.shtml http://www.eope.net/CN/abstract/abstract17992.shtml .

W Q SHANG , W X ZHANG , ZH WU , 等 . Three-dimensional measurement system based on full-field heterodyne interferometry . Opt. Precision Eng , 2019 . 27 ( 10 ): 2097 - 2104 . http://www.eope.net/CN/abstract/abstract17992.shtml http://www.eope.net/CN/abstract/abstract17992.shtml .

LIN K H, HU Y H. White-light interferometric techniques in microstructure measurement[C]. Proc SPIE 6280, Third International Symposium on Precision Mechanical Measurements , 2006: 62800X.

R GROSS , P ETTL , LABOUREUX . White-Light Iinterferometry in High Precision Industrial Applications . Measure and Quality Control in Production , 2004 . 10 ( 12 ): 123 - 130 .

戴蓉.基于垂直扫描工作台的白光干涉表面形貌测量系统研究[D].武汉: 华中科技大学, 2007.

DAI R. A Research on White-light Interferometric Measurement System of Surface Topography Based on the Scanning Positioning Stage [D]. Wuhan: Huazhong University of Science and Technology, 2007.(in Chinese)

马龙 , 郭彤 , 赵健 , 等 . 基于白光相移干涉术的微结构几何尺寸表征 . 纳米技术与精密工程 , 2011 . 9 ( 1 ): 39 - 43 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=nmjsyjmgc201101008 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=nmjsyjmgc201101008 .

L MA , T GUO , J ZHAO , 等 . MEMS geometric parameters measurement based on white light phase shifting interferometry . Nanotechnology and Precision Engineering , 2011 . 9 ( 1 ): 39 - 43 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=nmjsyjmgc201101008 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=nmjsyjmgc201101008 .

刘晨 , 陈磊 , 王军 , 等 . 利用白光扫描干涉测量表面微观形貌 . 光电工程 , 2011 . 38 ( 1 ): 71 - 75 . http://d.old.wanfangdata.com.cn/Periodical/gdgc201101014 http://d.old.wanfangdata.com.cn/Periodical/gdgc201101014 .

CH LIU , L CHEN , J WANG , 等 . Measurement of surface topography by using white-light scanning interferometry . Opto-Electronic Engineering , 2011 . 38 ( 1 ): 71 - 75 . http://d.old.wanfangdata.com.cn/Periodical/gdgc201101014 http://d.old.wanfangdata.com.cn/Periodical/gdgc201101014 .

郑毅.垂直扫描白光干涉表面形貌测量软件系统研究[D].武汉: 华中科技大学, 2015.

ZHENG Y. A Research on Software System of Vertical Scanning White Light Interferometry Measurement of Surface Topography [D]. Wuhan: Huazhong University of Science and Technology, 2015.(in Chinese)

S J LUO , T SUZUKI , O SASAKI , 等 . Signal correction by detection of scanning position in a white-light interferometer for exact surface profile measurement . Applied Optics , 2019 . 58 ( 13 ): 3548 - 3554 . http://cn.bing.com/academic/profile?id=50cfb968e8098d794eb30d9087477c0d&encoded=0&v=paper_preview&mkt=zh-cn http://cn.bing.com/academic/profile?id=50cfb968e8098d794eb30d9087477c0d&encoded=0&v=paper_preview&mkt=zh-cn .

孙杰 , 刘铁根 , 张以谟 , 等 . 白光干涉零光程差位置的五步测量法 . 光电子·激光 , 2003 . 14 ( 12 ): 1319 - 1323 . http://d.old.wanfangdata.com.cn/Periodical/gdzjg200312019 http://d.old.wanfangdata.com.cn/Periodical/gdzjg200312019 .

J SUN , T G LIU , Y M ZHANG , 等 . Five-step measurement method for the position of zero light path difference in a white light interfering system . Journal of Optoelectronics·laser , 2003 . 14 ( 12 ): 1319 - 1323 . http://d.old.wanfangdata.com.cn/Periodical/gdzjg200312019 http://d.old.wanfangdata.com.cn/Periodical/gdzjg200312019 .

S K DEBNATH , M P KOTHIYAL . Experimental study of the phase-shift miscalibration error in phase-shifting interferometry: use of a spectrally resolved white-light interferometer . Applied Optics , 2007 . 46 ( 22 ): 5103 - 5109 . http://cn.bing.com/academic/profile?id=9296753d2f2a5d2fe07bd6c8154b6f4d&encoded=0&v=paper_preview&mkt=zh-cn http://cn.bing.com/academic/profile?id=9296753d2f2a5d2fe07bd6c8154b6f4d&encoded=0&v=paper_preview&mkt=zh-cn .

谢元安 , 韩志刚 . 基于白光干涉的空间频域算法研究 . 光电工程 , 2011 . 38 ( 7 ): 81 - 85 . http://d.old.wanfangdata.com.cn/Periodical/gdgc201107015 http://d.old.wanfangdata.com.cn/Periodical/gdgc201107015 .

Y A XIE , ZH G HAN . Study of spatial frequency domain analysis method based on white light interferometry . Opto-Electronic Engineering , 2011 . 38 ( 7 ): 81 - 85 . http://d.old.wanfangdata.com.cn/Periodical/gdgc201107015 http://d.old.wanfangdata.com.cn/Periodical/gdgc201107015 .

赵智亮 , 夏伯才 , 陈立华 , 等 . 相移干涉测量中相移误差的自修正 . 光学精密工程 , 2013 . 21 ( 5 ): 1116 - 1121 . http://www.eope.net/CN/abstract/abstract14675.shtml http://www.eope.net/CN/abstract/abstract14675.shtml .

ZH L ZHAO , B C XIA , L H CHEN , 等 . Self-correction of phase step error in phase shifting interferometric measurement . Opt. Precision Eng , 2013 . 21 ( 5 ): 1116 - 1121 . http://www.eope.net/CN/abstract/abstract14675.shtml http://www.eope.net/CN/abstract/abstract14675.shtml .

史琪琪.白光干涉显微系统及微观形貌移相算法研究[D].南京: 南京理工大学, 2015.

SHI Q Q. Research on White Light Interference Microscopy System and Microscopic Phase Shifting Algorithm [D]. Nanjing: Nanjing University of Science and Technology, 2015. (in Chinese)

G GIANTO , F SALZENSTEIN , P MONTGOMERY . Comparison of envelope detection techniques in coherence scanning interferometry . Applied Optics , 2016 . 55 ( 24 ): 6763 - 6774 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=67aa8f277952b9396dc17d719ef75f7d http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=67aa8f277952b9396dc17d719ef75f7d .

Q VO , F Z FANG , X D ZHANG , 等 . Surface recovery algorithm in white light interferometry based on combined white light phase shifting and fast Fourier transform algorithms . Applied Optics , 2017 . 56 ( 29 ): 8174 - 8185 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a33cc92eaab181e23f9869f787a8401d http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a33cc92eaab181e23f9869f787a8401d .

H C GAO , Y JIANG , L C ZHANG , 等 . Five-step phase-shifting white-light interferometry for the measurement of fiber optic extrinsic Fabry-Perot interferometers . Applied Optics , 2018 . 57 ( 5 ): 1168 - 1173 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a84fee5a0f991003f7e82d61aed3131f http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a84fee5a0f991003f7e82d61aed3131f .

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