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Shafting design for precise two-dimensional turntable applied to Φ 300 mm plane mirror
Micro/Nano Technology and Fine Mechanics | 更新时间:2020-07-09
    • Shafting design for precise two-dimensional turntable applied to Φ 300 mm plane mirror

    • Optics and Precision Engineering   Vol. 28, Issue 5, Pages: 1075-1082(2020)
    • DOI:10.3788/OPE.20202805.1075    

      CLC: TH743
    • Received:15 November 2019

      Revised:16 December 2019

      Accepted:16 December 2019

      Published:15 May 2020

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  • Fu-nan YU, Shu-yan XU. Shafting design for precise two-dimensional turntable applied to Φ 300 mm plane mirror[J]. Optics and precision engineering, 2020, 28(5): 1075-1082. DOI: 10.3788/OPE.20202805.1075.

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