Progress on performance promotion technologies of rotary traveling wave ultrasonic motors

Da-wei AN; Jian-hui ZHANG; Hao-dong XUE; Qing-shuang NING; Wei-qing HUANG

doi:10.3788/OPE.20202805.1109

您当前的位置：

首页 >

文章列表页 >

Progress on performance promotion technologies of rotary traveling wave ultrasonic motors

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-07-09

- Progress on performance promotion technologies of rotary traveling wave ultrasonic motors
- Optics and Precision Engineering Vol. 28, Issue 5, Pages: 1109-1115(2020)
- 作者机构：
  
  广州大学机械与电气工程学院, 广东广州 510006
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20202805.1109
  CLC： TM356;TB559;TN384
- Received：16 October 2019，
  
  Revised：23 December 2019，
  
  Accepted：23 December 2019，
  
  Published：15 May 2020
- 稿件说明：
移动端阅览
Da-wei AN, Jian-hui ZHANG, Hao-dong XUE, et al. Progress on performance promotion technologies of rotary traveling wave ultrasonic motors[J]. Optics and precision engineering, 2020, 28(5): 1109-1115.
DOI：

Da-wei AN, Jian-hui ZHANG, Hao-dong XUE, et al. Progress on performance promotion technologies of rotary traveling wave ultrasonic motors[J]. Optics and precision engineering, 2020, 28(5): 1109-1115. DOI： 10.3788/OPE.20202805.1109.

摘要

为推动旋转行波超声电机的发展及其在精密驱动领域的应用

综述了其性能提升技术研究进展并分析了现阶段尚且存在的技术问题。首先

从定子行波的合成、质点椭圆运动轨迹、接触界面的摩擦驱动等方面论述了传统旋转行波超声电机的运行机理。然后

从结构优化和新材料应用角度综述了旋转行波超声电机的发展及其局限性; 从温升控制角度阐释了温度变化对超声电机性能的影响并介绍了现有解决方案; 论述了变预压力对谐振频率漂移的耦合影响

并指出了目前研究存在的不足; 从双行波驱动角度分析了超声电机发展过程中的重大突破

概况了其研究历程及可行的发展方向。最后

归纳了旋转行波超声电机亟待解决的技术难题

并建议了解决方案。

Abstract

To spur the development and application of rotary traveling wave ultrasonic motors for precision driving

the progress regarding the performance promotion technologies and remaining unsolved technical problems were summarized. First

the operation mechanism was introduced to discuss the synthesis of traveling waves

the trajectory of particle elliptical motion

and friction drive at the contact interface. Then

structural improvements and the application of new materials were reviewed. The influence of increasing temperature was analyzed and the solution was discussed. By investigating the coupling relationship between the preload and the resonant frequency

the shortcomings of present studies were indicated. With the proposed driving mechanism of a dual traveling wave

rotary traveling wave ultrasonic motors could seize the opportunity to enhance the output performance

and the study progress and future directions were discussed. Finally

the challenges and feasible alternatives for rotary traveling wave ultrasonic motors were discussed.

关键词

Keywords

references

W SHI , H ZHAO , J MA , 等 . Optimal working frequency of ultrasonic motors . Ultrasonics , 2016 . 70 38 - 44 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=7aba904f363456511b37bc814a8689b5 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=7aba904f363456511b37bc814a8689b5 .

时运来 , 程丁继 , 张军 , 等 . 拉压负载下的大推力压电直线作动器 . 光学精密工程 , 2019 . 27 ( 4 ): 832 - 841 . http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201904010 http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201904010 .

Y L SHI , D J CHENG , J ZHANG , 等 . Large-thrust piezoelectric linear actuator under tension and pressure load . Opt. Precision Eng. , 2019 . 27 ( 4 ): 832 - 841 . http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201904010 http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201904010 .

J WANG , X HU , B WANG , 等 . A novel two-degree-of-freedom spherical ultrasonic motor using three travelling-wave type annular stators . Journal of Central South University , 2015 . 22 ( 4 ): 1298 - 1306 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zngydxxb-e201504017 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zngydxxb-e201504017 .

Y ZHOU , J CHANG , X LIAO , 等 . Ring-shaped traveling wave ultrasonic motor for high-output power density with suspension stator . Ultrasonics , 2020 . 102 106040 http://cn.bing.com/academic/profile?id=88e3b488c667ed99d8963f6243da4679&encoded=0&v=paper_preview&mkt=zh-cn http://cn.bing.com/academic/profile?id=88e3b488c667ed99d8963f6243da4679&encoded=0&v=paper_preview&mkt=zh-cn .

Y LIU , J LIU , W CHEN , 等 . A Square-type rotary ultrasonic motor using longitudinal modes . Journal of Electroceramics , 2014 . 33 ( 1-2 ): 69 - 74 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=1a1f807358785e6493a67b1bb4d27b2b http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=1a1f807358785e6493a67b1bb4d27b2b .

M GUO , S PAN , J HU , 等 . A small linear ultrasonic motor utilizing longitudinal and bending modes of a piezoelectric tube . IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control , 2014 . 61 ( 4 ): 705 - 709 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=58ae73a12f580c3303be427c561486b4 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=58ae73a12f580c3303be427c561486b4 .

钟相强 , 黄卫清 , 张轩 , 等 . 二级杠杆柔性铰链复合结构的双足压电直线电机 . 光学精密工程 , 2018 . 26 ( 1 ): 86 - 94 . http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201801012 http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201801012 .

X Q ZHONG , W Q HUANG , X ZHANG , 等 . Double-foot piezoelectric linear motor with secondary and flexure hinge composite structure . Opt. Precision Eng. , 2018 . 26 ( 1 ): 86 - 94 . http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201801012 http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201801012 .

F QIN , Y CHEN , X SUN , 等 . An adjustable magnetic preloading and stepping controlled piezoelectric traveling-wave ultrasonic micromotor . Journal of Microelectromechanical Systems , 2019 . 28 ( 2 ): 264 - 270 .

CH SH ZHAO . Ultrasonic Motors Technologies and Applications , : Beijing Science Press , 2011 .

J SHI , F ZHAO , X SHEN , 等 . Chaotic operation and chaos control of travelling wave ultrasonic motor . Ultrasonics , 2013 . 53 ( 6 ): 1112 - 1123 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=48e3b0d7cd56473f64161a2a5b46bd6d http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=48e3b0d7cd56473f64161a2a5b46bd6d .

J S RO , K P YI , T K CHUNG , 等 . Characteristic analysis and shape optimal design of a ring-type traveling wave ultrasonic motor . The European Physical Journal - Applied Physics , 2013 . 63 ( 1 ): http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=df79c2e8822e5604fcd3c9996e586f8b http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=df79c2e8822e5604fcd3c9996e586f8b .

L K CHANG , M C TSAI . Design of single-phase driven screw-thread-type ultrasonic motor . Review of Scientific Instruments , 2016 . 87 ( 5 ): 055002 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=10b3c0419ee21fcc05b235bf6fe3f445 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=10b3c0419ee21fcc05b235bf6fe3f445 .

W QIU , Y MIZUNO , D KOYAMA , K Nakamura . Efficiency improvement of hybrid transducer-type ultrasonic motor using lubricant . IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control , 2013 . 60 ( 4 ): 786 - 794 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=f55e8685c6c74497e7e3be82711146dd http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=f55e8685c6c74497e7e3be82711146dd .

K TANAKA , S MU , S NAKASHIMA . Meal-assistance robot using ultrasonic motor with eye interface . International Journal of Automation Technology , 2014 . 8 ( 2 ): 186 - 192 . http://cn.bing.com/academic/profile?id=c679491455bea518080a8094de02d4dc&encoded=0&v=paper_preview&mkt=zh-cn http://cn.bing.com/academic/profile?id=c679491455bea518080a8094de02d4dc&encoded=0&v=paper_preview&mkt=zh-cn .

X LI , ZH YAO , R WU . Modeling and analysis of stick-slip motion in a linear piezoelectric ultrasonic motor considering ultrasonic oscillation effect . International Journal of Mechanical Sciences , 2016 . 107 ( Supplement C ): 215 - 224 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=c1d85272762843312afd2e632c47bae0 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=c1d85272762843312afd2e632c47bae0 .

王贞艳 , 贾高欣 . 压电陶瓷作动器非对称迟滞建模与内模控制 . 光学精密工程 , 2018 . 26 ( 10 ): 2484 - 2492 . http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201810017 http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201810017 .

ZH Y WANG , G X JIA . Asymmetric hysteresis modeling and internal mode control of piezoelectric actuators . Opt. Precision Eng. , 2018 . 26 ( 10 ): 2484 - 2492 . http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201810017 http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201810017 .

M X SUN , W Q HUANG , Y WANG , 等 . Experiment on a double-foot stepping piezoelectric linear motor . Transactions of Nanjing University of Aeronautics and Astronautics , 2018 . 35 ( 3 ): 423 - 431 . http://d.old.wanfangdata.com.cn/Periodical/njhkhtdxxb-e201803004 http://d.old.wanfangdata.com.cn/Periodical/njhkhtdxxb-e201803004 .

P HAGEDORN , J WALLASCHEK . Travelling wave ultrasonic motors, Part Ⅰ: Working principle and mathematical modelling of the stator . Journal of Sound and Vibration , 1992 . 155 ( 1 ): 31 - 46 .

P HAGEDORN , J WALLASCHEK , W KONRAD . Travelling wave ultrasonic motors, Part Ⅱ: A numerical method for the flexural vibrations of the stator . Journal of Sound and Vibration , 1993 . 168 ( 1 ): 115 - 122 .

T MASHIMO , K TERASHIMA . Experimental verification of elliptical motion model in traveling wave ultrasonic motors . IEEE/ASME Transactions on Mechatronics , 2015 . 20 ( 6 ): 2699 - 2707 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a454a3bb77d27a27d6c773f12c8ff9e0 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a454a3bb77d27a27d6c773f12c8ff9e0 .

Y YAMAYOSHI , S HIROSE . Ultrasonic motor not using mechanical friction force . International Journal of Applied Electromagnetics in Materials , 1992 . 3 ( 3 ): 179 - 182 . http://d.old.wanfangdata.com.cn/Periodical/jxgcxb200105012 http://d.old.wanfangdata.com.cn/Periodical/jxgcxb200105012 .

L P CHENG , S Y ZHANG . Parameter survey of the performance of a noncontact ultrasonic motor . Journal of Applied Physics , 2009 . 106 ( 7 ): 074506 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=0b0aa576b0849eef0a7bf9fe410838cc http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=0b0aa576b0849eef0a7bf9fe410838cc .

W CHEN , S SHI , Y LIU , 等 . A new traveling wave ultrasonic motor using thick ring stator with nested PZT excitation . IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control , 2010 . 57 ( 5 ): 1160 - 1168 . http://d.old.wanfangdata.com.cn/Periodical/zjdxxb-e201203005 http://d.old.wanfangdata.com.cn/Periodical/zjdxxb-e201203005 .

X LU , J HU , L YANG , 等 . A novel dual stator-ring rotary ultrasonic motor . Sensors and Actuators A: Physical , 2013 . 189 504 - 511 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=14694e9dc063b063d03505f7c3ee2b87 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=14694e9dc063b063d03505f7c3ee2b87 .

T J PENG , H Y SHI , X LIANG , 等 . Experimental investigation on sandwich structure ring-type ultrasonic motor . Ultrasonics , 2015 . 56 303 - 307 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=2897a042b1f6f4c919528cd7d6836053 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=2897a042b1f6f4c919528cd7d6836053 .

ROMLAY F R MOHD , YUSOFF W A WAN , PIAH K A MAT . Increasing the efficiency of traveling wave ultrasonic motor by modifying the stator geometry . Ultrasonics , 2016 . 64 177 - 185 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=4b32e8242aebbcf49a08f419bc45aed3 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=4b32e8242aebbcf49a08f419bc45aed3 .

J ZHANG , L YANG , C MA , 等 . Improving efficiency of traveling wave rotary ultrasonic motor by optimizing stator . Review of Scientific Instruments , 2019 . 90 ( 5 ): 056104 http://cn.bing.com/academic/profile?id=caeb3d56b4fb6f8422fb116f1b615068&encoded=0&v=paper_preview&mkt=zh-cn http://cn.bing.com/academic/profile?id=caeb3d56b4fb6f8422fb116f1b615068&encoded=0&v=paper_preview&mkt=zh-cn .

S DONG , L YAN , N WANG , 等 . A small, linear, piezoelectric ultrasonic cryomotor . Applied Physics Letters , 2005 . 86 ( 5 ): 053501 http://d.old.wanfangdata.com.cn/NSTLQK/10.1063-1.1855424/ http://d.old.wanfangdata.com.cn/NSTLQK/10.1063-1.1855424/ .

S ZHANG , F LI . High performance ferroelectric relaxor-P b T i O 3 single crystals: Status and perspective . Journal of Applied Physics , 2012 . 111 ( 3 ): 031301 .

Z CHEN , X LI , G LIU , 等 . A two degrees-of-freedom piezoelectric single-crystal micromotor . Journal of Applied Physics , 2014 . 116 ( 22 ): 224101 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=1e4ad5c7da2db39315dd387892702010 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=1e4ad5c7da2db39315dd387892702010 .

X LI , J CHEN , Z CHEN . A high-temperature double-mode piezoelectric ultrasonic linear motor . Applied Physics Letters , 2012 . 101 ( 7 ): 072902 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=c606c3270c091794664fd630a1003549 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=c606c3270c091794664fd630a1003549 .

P CI , G LIU , Z CHEN , 等 . A standing wave linear ultrasonic motor operating in face-diagonal-bending mode . Applied Physics Letters , 2013 . 103 ( 10 ): 102904 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=950f0c534490da705acbe33458dbd789 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=950f0c534490da705acbe33458dbd789 .

J WU , Y MIZUNO , M TABARU , 等 . Traveling wave ultrasonic motor using polymer-based vibrator . Japanese Journal of Applied Physics , 2016 . 55 ( 1 ): 018001 http://cn.bing.com/academic/profile?id=c833353654700068edacbb17860fe295&encoded=0&v=paper_preview&mkt=zh-cn http://cn.bing.com/academic/profile?id=c833353654700068edacbb17860fe295&encoded=0&v=paper_preview&mkt=zh-cn .

J WU , Y MIZUNO , K NAKAMURA . Structural parameter study on polymer-based ultrasonic motor . Smart Materials and Structures , 2017 . 26 ( 11 ): 115022 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=IOP_9372514 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=IOP_9372514 .

J LI , S LIU , N ZHOU , 等 . A traveling wave ultrasonic motor with a metal/polymer-matrix material compound stator . Smart Materials and Structures , 2018 . 27 ( 1 ): 015027 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=IOP_9385852 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=IOP_9385852 .

W QIU , Y MIZUNO , M TABARU , 等 . Can lubricant enhance the torque of ultrasonic motors? An experimental investigation . Applied Physics Letters , 2014 . 105 ( 22 ): 224102 http://cn.bing.com/academic/profile?id=280c1982dde1abb31457bec2fa6f4251&encoded=0&v=paper_preview&mkt=zh-cn http://cn.bing.com/academic/profile?id=280c1982dde1abb31457bec2fa6f4251&encoded=0&v=paper_preview&mkt=zh-cn .

X LU , J HU , C ZHAO . Analyses of the temperature field of traveling-wave rotary ultrasonic motors . IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control , 2011 . 58 ( 12 ): 2708 - 2719 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a7b9d0325c6bd0a1ccedc8ab0c625ea8 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a7b9d0325c6bd0a1ccedc8ab0c625ea8 .

S LI , W OU , M YANG , 等 . Temperature evaluation of traveling-wave ultrasonic motor considering interaction between temperature rise and motor parameters . Ultrasonics , 2015 . 57 159 - 166 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=879dc9583a39bee304bcbb6af35f8434 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=879dc9583a39bee304bcbb6af35f8434 .

W OU , M YANG , F MENG , 等 . Continuous high-performance drive of rotary traveling-wave ultrasonic motor with water cooling . Sensors and Actuators A: Physical , 2015 . 222 220 - 227 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a4b90e00b4f7403c71bad1d52f3156dc http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a4b90e00b4f7403c71bad1d52f3156dc .

王光庆 , 沈润杰 , 郭吉丰 . 预压力对超声波电机特性的影响研究 . 浙江大学学报(工学版) , 2007 . ( 3 ): 436 - 440 . http://d.old.wanfangdata.com.cn/Periodical/zjdxxb-gx200703014 http://d.old.wanfangdata.com.cn/Periodical/zjdxxb-gx200703014 .

G Q WANG , R J SHEN , J F GUO . Researches on effects to ultrasonic motor's performance of preload . Journal of Zhejiang University (Engineering Science) , 2007 . ( 3 ): 436 - 440 . http://d.old.wanfangdata.com.cn/Periodical/zjdxxb-gx200703014 http://d.old.wanfangdata.com.cn/Periodical/zjdxxb-gx200703014 .

王光庆 . 预压力对超声波电动机性能影响的实验研究 . 微特电机 , 2008 . ( 6 ): 4 - 6, 12 . http://d.old.wanfangdata.com.cn/Periodical/wtdj200806002 http://d.old.wanfangdata.com.cn/Periodical/wtdj200806002 .

G Q WANG . Effects of preload on the characteristics of ultrasonic motors . Small & Special Electrical Machines , 2008 . ( 6 ): 4 - 6, 12 . http://d.old.wanfangdata.com.cn/Periodical/wtdj200806002 http://d.old.wanfangdata.com.cn/Periodical/wtdj200806002 .

周盛强 , 赵淳生 , 黄卫清 . 旋转型行波超声电机接触界面的空间域分析 . 中国电机工程学报 , 2010 . 30 ( 12 ): 63 - 68 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgdjgcxb201012010 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgdjgcxb201012010 .

SH Q ZHOU , CH SH ZHAO , W Q HUANG . Contact analysis of traveling wave type rotary ultrasonic motor in space domain . Proceedings of the CSEE , 2010 . 30 ( 12 ): 63 - 68 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgdjgcxb201012010 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgdjgcxb201012010 .

张炜 , 李胤 , 杨正伟 , 等 . 预应力对超声电机定子振动影响分析 . 微电机 , 2014 . ( 9 ): 18 - 21, 31 . http://d.old.wanfangdata.com.cn/Periodical/wdj201409005 http://d.old.wanfangdata.com.cn/Periodical/wdj201409005 .

W ZHANG , Y LI , ZH W YANG , 等 . Affect of pre-pressure on ultrasonic motor stator vibration . Micromotors , 2014 . ( 9 ): 18 - 21, 31 . http://d.old.wanfangdata.com.cn/Periodical/wdj201409005 http://d.old.wanfangdata.com.cn/Periodical/wdj201409005 .

A MUSTAFA , T MORITA . Efficiency optimization of rotary ultrasonic motors using extremum seeking control with current feedback . Sensors and Actuators A: Physical , 2019 . 289 26 - 33 . http://cn.bing.com/academic/profile?id=b02932e8480ec42ea7e9f4a752bfef5b&encoded=0&v=paper_preview&mkt=zh-cn http://cn.bing.com/academic/profile?id=b02932e8480ec42ea7e9f4a752bfef5b&encoded=0&v=paper_preview&mkt=zh-cn .

D BAI , T ISHⅡ , K NAKAMURA , 等 . An ultrasonic motor driven by the phase-velocity difference between two traveling waves . IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control , 2004 . 51 ( 6 ): 680 - 685 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=445ab5aa87540399af8b338b1c0271fa http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=445ab5aa87540399af8b338b1c0271fa .

ZH DONG , M YANG , Z CHEN , 等 . Design and performance analysis of a rotary traveling wave ultrasonic motor with double vibrators . Ultrasonics , 2016 . 71 134 - 141 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a235e0ce578a388d607181d31538e8a6 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a235e0ce578a388d607181d31538e8a6 .

ZH DONG , M YANG . Optimal design of a double-vibrator ultrasonic motor using combination method of finite element method, sensitivity analysis and adaptive genetic algorithm . Sensors and Actuators A: Physical , 2017 . 266 ( Supplement C ): 1 - 8 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=7f38cd42b589277f576337faaf792037 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=7f38cd42b589277f576337faaf792037 .

D W AN , M YANG , X ZHUANG , 等 . Dual traveling wave rotary ultrasonic motor with single active vibrator . Applied Physics Letters , 2017 . 110 ( 14 ): 143507 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=99fbc84bc8e71093b253e3c011af0aa6 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=99fbc84bc8e71093b253e3c011af0aa6 .

Views

693

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰