Study on nano-vibration mechanism of orifice throttle aerostatic thrust bearing

Wei WANG; Chao WANG; Yue-qing ZHENG; Hai-long CUI

doi:10.3788/OPE.20202808.1761

您当前的位置：

首页 >

文章列表页 >

Study on nano-vibration mechanism of orifice throttle aerostatic thrust bearing

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-14

- Study on nano-vibration mechanism of orifice throttle aerostatic thrust bearing
- Optics and Precision Engineering Vol. 28, Issue 8, Pages: 1761-1774(2020)
- 作者机构：
  
  1.电子科技大学机械与电气工程学院, 四川成都 611731
  2.中国工程物理研究院机械制造工艺研究所, 四川绵阳 621000
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20202808.1761
  CLC： TQ021.1;TH133.36
- Received：12 March 2020，
  
  Revised：15 April 2020，
  
  Accepted：15 April 2020，
  
  Published：25 August 2020
- 稿件说明：
移动端阅览
Wei WANG, Chao WANG, Yue-qing ZHENG, et al. Study on nano-vibration mechanism of orifice throttle aerostatic thrust bearing[J]. Optics and precision engineering, 2020, 28(8): 1761-1774.
DOI：

Wei WANG, Chao WANG, Yue-qing ZHENG, et al. Study on nano-vibration mechanism of orifice throttle aerostatic thrust bearing[J]. Optics and precision engineering, 2020, 28(8): 1761-1774. DOI： 10.3788/OPE.20202808.1761.

摘要

为了揭示气体静压轴承微振动的产生要素，从微观流场角度出发通过计算流体动力学（CFD）对气膜流场进行三维数值大涡模拟（LES）与分析。首先，设计不同单一变量从而相对气容不同的五组仿真实验组，通过仿真研究内部气容对微观流场的影响。接着，通过观察不同结构的仿真结果，从各种参数中找出可能引发微振动的激励振源。最后，采用不同压力的供气进行仿真说明内部压强对内部流场的影响。计算结果表明，当相对气容约在1%时，一定的内部气容就会明显导致气体静压轴承微振动；均压腔附近的压力波动是诱发微振动的激励振源；内部压强的高低则与振动幅度有着一定的联系。总之，气体静压轴承的微振动与微观流场的变化有着直接的联系，而流场转捩产生的涡旋是其主要原因。

Abstract

To reveal the factors responsible for generation of the nano-vibration of aerostatic bearings

computational fluid dynamics and three-dimensional numerical large eddy simulations were employed herein for the analysis of the air film flow field from the perspective of the microscopic flow field. First

five simulated experimental groups were designed to investigate the effect of the internal gas volume on the microscopic flow field using different single variables and under different relative gas capacities. Subsequently

the simulation results of different structure parameters were analyzed

according to which the excitation sources that can result in generation of nano-vibrations were determined. Finally

the influence of internal pressure on the flow field was illustrated via the simulation of different supply pressures. A certain internal gas volume leads to the nano-vibration of aerostatic bearings when the relative gas capacity is approximately 1%. The pressure fluctuation near the equalizing cavity may be the excitation source responsible for inducing nano-vibration; the internal pressure also influences the amplitude of the vibration to a certain extent. In conclusion

the changes in the microscopic flow field directly in fluence nano-vibration

while the vortex generated uponflow field transition is the major factor causing it.

关键词

Keywords

references

朱新龙 , 孙军 , 张亮 , 等 . 气体轴承润滑研究的现状及展望 . 机械设计 , 2015 . 32 ( 1 ): 1 - 5 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxsj201501001 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxsj201501001 .

X L ZHU , J SUN , L ZHANG , 等 . Status and prospect of research on gas bearing lubrication . Journal of Machine Design , 2015 . 32 ( 1 ): 1 - 5 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxsj201501001 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxsj201501001 .

Q GAO , W Q CHEN , L H LU , 等 . Aerostatic bearings design and analysis with the application to precision engineering:State-of-the-art and future perspectives . Tribology International , 2019 . 135 1 - 17 . http://www.sciencedirect.com/science/article/pii/S0301679X19300830 http://www.sciencedirect.com/science/article/pii/S0301679X19300830 .

S YOSHIMOTO , M YAMAMOTO , K TODA . Numerical calculations of pressure distribution in the bearing clearance of circular aerostatic thrust bearings with a single air supply inlet . Journal of Tribology-Transactions of the Asme , 2007 . 129 ( 2 ): 384 - 390 .

M E ELESHAKY . CFD investigation of pressure depressions in aerostatic circular thrust bearings . Tribology International , 2009 . 42 ( 7 ): 1108 - 1117 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=39aa1119aeff33910315a8d0f5c55d42 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=39aa1119aeff33910315a8d0f5c55d42 .

T AOYAMA , K KOIZUMI , Y KAKINUMA , 等 . Numerical and experimental analysis of transient state micro-bounce of aerostatic guideways caused by small pores . Cirp Annals-Manufacturing Technology , 2009 . 58 ( 1 ): 367 - 370 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=5daf7010fb58b59e03792886c0dac2c3 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=5daf7010fb58b59e03792886c0dac2c3 .

X D CHEN , H CHEN , X LUO , 等 . Air vortices and nano-vibration of aerostatic bearings . Tribol. Lett , 2011 . 42 179 - 183 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=e40f8226cc90a695421fe36c510545ba http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=e40f8226cc90a695421fe36c510545ba .

T YOSHIMURA , T HANAFUSA , T KITAGAWA , 等 . Clarifications of the mechanism of nano-fluctuation of aerostatic thrust bearing with surface restriction . Tribology International , 2012 . 48 ( 4 ): 29 - 34 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=0a708a26c1bf4b82b665d65628517b65 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=0a708a26c1bf4b82b665d65628517b65 .

陈琦 , 陈斌 , 蔡黎明 . 均压槽对空气静压轴承微振动的影响 . 光学精密工程 , 2014 . 22 ( 12 ): 3354 - 3359 . http://ope.lightpublishing.cn/thesisDetails?columnId=2173125&Fpath=&index=0&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=2173125&Fpath=&index=0&l=zh .

Q CHEN , B CHEN , L M CAI . Effect of equalizing tank on micro-vibration of aerostatic bearing . Opt. Precision Eng. , 2014 . 22 ( 12 ): 3354 - 3359 . http://ope.lightpublishing.cn/thesisDetails?columnId=2173125&Fpath=&index=0&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=2173125&Fpath=&index=0&l=zh .

Y LI , X WAN , X LI . Microvibration suppression of an aerostatic thrust bearing adopting flow field disturbance structure . Advances in Mechanical Engineering , 2017 . 9 ( 9 ): 1 - 9 . http://www.researchgate.net/publication/319708723_Microvibration_suppression_of_an_aerostatic_thrust_bearing_adopting_flow_field_disturbance_structure http://www.researchgate.net/publication/319708723_Microvibration_suppression_of_an_aerostatic_thrust_bearing_adopting_flow_field_disturbance_structure .

王云飞 . 气体润滑理论与气体轴承设计 , : 北京机械工业出版社 , 1999 .

Y F WANG . Gas Lubrication Theory and Gas Bearing Design , : Beijing China Machine Press , 1999 .

孔中科 , 陶继忠 . 圆形和锥形压力腔气体静压轴承气旋现象研究 . 润滑与密封 , 2013 . 38 ( 2 ): 67 - 71, 75 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=rhymf201302018 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=rhymf201302018 .

ZH K KONG , J ZH TAO . Study on the cyclone phenomenon of gas bearing with circular and conical pressure chamber . Lubrication Engineering , 2013 . 38 ( 2 ): 67 - 71, 75 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=rhymf201302018 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=rhymf201302018 .

夏毅敏 , 王洋 , 胡均平 , 等 . 节流器结构参数对Nanosys-1000液体静压导轨承载特性的影响 . 光学精密工程 , 2015 . 23 ( 9 ): 2586 - 2594 . http://ope.lightpublishing.cn/thesisDetails?columnId=1793253&Fpath=&index=0&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1793253&Fpath=&index=0&l=zh .

Y M XIA , Y WANG , J P HU , 等 . Influence of the structure parameters of the throttle device on the bearing characteristics of Nanosys-1000 hydrostatic guide . Opt. Precision Eng. , 2015 . 23 ( 9 ): 2586 - 2594 . http://ope.lightpublishing.cn/thesisDetails?columnId=1793253&Fpath=&index=0&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1793253&Fpath=&index=0&l=zh .

孙昂 , 于贺春 , 原彬 , 等 . 环形进气锥腔结构静压气体轴承性能研究 . 润滑与密封 , 2015 . 40 ( 3 ): 26 - 29 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=rhymf201503007 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=rhymf201503007 .

ANG SUN , H CH YU , B YUAN , 等 . Study on the performance of hydrostatic gas bearing with annular intake cone cavity . Lubrication Engineering , 2015 . 40 ( 3 ): 26 - 29 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=rhymf201503007 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=rhymf201503007 .

赵艳凤 , 彭旭东 , 江锦波 , 等 . 均压槽结构形状对静压干气密封性能影响分析 . 摩擦学学报 , 2017 . 37 ( 5 ): 677 - 685 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=mcxxb201705017 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=mcxxb201705017 .

Y F ZHAO , X D PENG , J B JIANG , 等 . Analysis on the influence of the structure shape of pressure tank on the static pressure dry gas seal performance . Tribology , 2017 . 37 ( 5 ): 677 - 685 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=mcxxb201705017 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=mcxxb201705017 .

赵晓龙 , 张君安 , 董皓 , 等 . 变截面节流器对空气静压轴承承载性能的影响 . 光学精密工程 , 2018 . 26 ( 10 ): 2446 - 2454 . http://ope.lightpublishing.cn/thesisDetails?columnId=1418324&Fpath=&index=0&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1418324&Fpath=&index=0&l=zh .

X L ZHAO , J A ZHANG , H DONG , 等 . Influence of variable section throttle on performance of aerostatic bearings . Opt. Precision Eng. , 2018 . 26 ( 10 ): 2446 - 2454 . http://ope.lightpublishing.cn/thesisDetails?columnId=1418324&Fpath=&index=0&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=1418324&Fpath=&index=0&l=zh .

林晓亮 , 邓小雷 , 林峰 , 等 . 基于CFD开槽静压气体球轴承轴向承载性能分析 . 航空制造技术 , 2019 . 62 ( 9 ): 94 - 101 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hkgyjs201909012 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hkgyjs201909012 .

X L LIN , X L DENG , F LIN , 等 . Axial bearing performance analysis based on CFD slotted static pressure gas ball bearing . Aeronautical Manufacturing Technology , 2019 . 62 ( 9 ): 94 - 101 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hkgyjs201909012 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hkgyjs201909012 .

车健 , 江锦波 , 李纪云 , 等 . 节流孔截面形状对静压干气密封稳态性能和压力波动特性影响 . 摩擦学学报 , 2019 . 39 ( 6 ): 669 - 679 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=mcxxb201906001 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=mcxxb201906001 .

J CHE , J B JIANG , J Y LI , 等 . The shape of orifice section affects the steady-state performance and pressure fluctuation characteristics of hydrostatic dry gas seal . Tribology , 2019 . 39 ( 6 ): 669 - 679 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=mcxxb201906001 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=mcxxb201906001 .

YI YU ZHI , Q Z ZHANG , R HUANG , 等 . Numerical analysis of gas-liquid mixed transport process in a multiphase rotodynamic pump . IOP Conference Series:Earth and Environmental Science , 2012 . 15 ( 11 ): 2062 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=HYEC1_000000395246 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=HYEC1_000000395246 .

J CH ZHU , H CHEN , X D CHEN . Large eddy simulation of vortex shedding and pressure fluctuation in aerostatic bearings . Journal of Fluids and Structures , 2013 . 40 ( 7 ): 42 - 51 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=18b4dd08971a0cc835664513285fdfcf http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=18b4dd08971a0cc835664513285fdfcf .

李运堂 , 蔺应晓 , 朱红霞 , 等 . 基于大涡模拟静压气体推力轴承微幅自激振动特性分析 . 机械工程学报 , 2013 . 49 ( 13 ): 56 - 62 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxgcxb201313008 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxgcxb201313008 .

Y T LI , Y X LIN , H X ZHU , 等 . Analysis of micro-amplitude self-excited vibration of static pressure gas thrust bearing based on large eddy simulation . Journal of mechanical engineering , 2013 . 49 ( 13 ): 56 - 62 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxgcxb201313008 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=jxgcxb201313008 .

X D CHEN , H CHEN , J CH ZHU , 等 . Vortex suppression and nano-vibration reduction of aerostatic bearings by arrayed microhole restrictors . Journal of Vibration and Control , 2017 . 23 ( 5 ): 842 - 852 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=10.1177/1077546315586493 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=10.1177/1077546315586493 .

范酬 , 高尚晗 , 李冰 , 等 . 基于CFD对气体静压径向轴承动态分析 . 流体动力学 , 2018 . 6 ( 4 ): 150 - 157 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=HANS201901210253 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=HANS201901210253 .

CH FAN , SH H GAO , B LI , 等 . Dynamic analysis of gas static pressure radial bearing based on CFD . International Journal of Fluid Dynamics , 2018 . 6 ( 4 ): 150 - 157 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=HANS201901210253 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=HANS201901210253 .

L Q PHAN , A D JOHNSTONE , B KOSASIH , 等 . Vortex Dynamics and Fluctuations of Impinging Planar Jet . ISIJ International , 2020 . 60 ( 5 ): 1030 - 1039 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=https://www.jstage.jst.go.jp/article/isijinternational/60/5/60_ISIJINT-2019-566/_article/-char/en http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=https://www.jstage.jst.go.jp/article/isijinternational/60/5/60_ISIJINT-2019-566/_article/-char/en .

徐抒岩 , 张旭升 , 范阔 , 等 . 大型光学系统波前检测中气流扰动影响的抑制 . 光学精密工程 , 2020 . 28 ( 1 ): 80 - 89 . http://ope.lightpublishing.cn/thesisDetails?columnId=2095661&Fpath=&index=0&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=2095661&Fpath=&index=0&l=zh .

SH Y XU , X SH ZHANG , K FAN , 等 . Suppression of airflow disturbance in wavefront detection of large optical systems . Opt. Precision Eng. , 2020 . 28 ( 1 ): 80 - 89 . http://ope.lightpublishing.cn/thesisDetails?columnId=2095661&Fpath=&index=0&l=zh http://ope.lightpublishing.cn/thesisDetails?columnId=2095661&Fpath=&index=0&l=zh .

张兆顺 , 崔桂香 , 许春晓 . 湍流大涡数值模拟的理论和应用 , : 北京清华大学出版社 , 2008 .

ZH SH ZHANG , G X CUI , CH X XU . Theory and Application of Numerical Simulation of Turbulent Large Eddy , : Beijing Tsinghua University Press , 2008 .

Views

688

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰