Grazing Incidence Interferometer Using Holographic Gratings As Beam-Splitters
光学精密工程1989年0卷第2期 页码:20-22
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网络出版日期:1989-04-15,
纸质出版日期:1989-04-15
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曹明. 采用全息光栅作分束器的斜入射干涉仪[J]. 光学精密工程, 1989,(2): 20-22
Cao Ming. Grazing Incidence Interferometer Using Holographic Gratings As Beam-Splitters[J]. Editorial Office of Optics and Precision Engineering, 1989,(2): 20-22
Cao Ming. Grazing Incidence Interferometer Using Holographic Gratings As Beam-Splitters[J]. Editorial Office of Optics and Precision Engineering, 1989,(2): 20-22DOI:
In this paper a grazing interferometry for measuring the flatness of non-optical surfaces is described. Many different surfaces have been examined
ranging from groundglass and photographic emulsions to metals such as steel
brass and aluminium
etc. The sensitivity of the measurement is such that one interference fringe represens a change of one half of the grating periodicity in height on the surface under examination. The visibility of interferogram can be improved by a suitable choice of gratings of different diffraction efficiency
or the grating orders.The interferometer is relatively easy to set-up and stable once aligned.