李燕, 徐迈, 王淑荣, 马长虹. 制备光致抗蚀剂光栅掩膜的衍射控制技术[J]. 光学精密工程, 1990,(3): 17-20

Li Yan, Xu Mai, Wang Shurong, Ma Changhong. Diffraction Monitoring Technique for FabriCating Photoresist Grating Masks[J]. Editorial Office of Optics and Precision Engineering, 1990,(3): 17-20

李燕, 徐迈, 王淑荣, 马长虹. 制备光致抗蚀剂光栅掩膜的衍射控制技术[J]. 光学精密工程, 1990,(3): 17-20 DOI：

Li Yan, Xu Mai, Wang Shurong, Ma Changhong. Diffraction Monitoring Technique for FabriCating Photoresist Grating Masks[J]. Editorial Office of Optics and Precision Engineering, 1990,(3): 17-20 DOI：