Cao Jianlin. Design Fabrication and Test for Soft X-ray Multilayered Mirrors[J]. Editorial Office of Optics and Precision Engineering, 1990,(5): 33-40DOI:
This paper presents a simple and efficient method for the design of soft X-ray multilayered coating and discusses the relevant techneques such as substrate preparation and film thickness control etc. X-ray small angle diffraction measurement results and soft X-ray reflectance measurement results at 171Å
231Å and 256Å were given in detail. Finally the future development for soft X-ray multilayered coatings was commented.