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网络出版日期:1991-04-15,
纸质出版日期:1991-04-15
移动端阅览
郭玉彬. 极紫外BRV光源的研究[J]. 光学精密工程, 1991,(2): 6-11
Guo Yubin. Investigation on Extreme Ultraviolet BRV Discharge Source[J]. Editorial Office of Optics and Precision Engineering, 1991,(2): 6-11
设计了一种高强度BRV真空火花光源
该光源辐射强度高、波段覆盖宽、光谱平滑连续、使用寿命长。其重复性、稳定性均优于15%
最适合在非同步辐射的一般实验室中使用。在VUV光谱学和软X射线显微术、光刻等研究及应用技术领域具有广泛的实用价值。本文阐述了光源的工作原理、设计思想和具体结构
给出了较理想的光谱测试结果。
A BRV intense vacuum spark source has been designed. It offers several advantages
high intensity
extended and smooth continuum
a good viability. It is capable of producing a smooth continuum spectrum from the visible down to at least 4nm. Its reproducibility and stability is found to be better than 15%. It is best suited to use in the general laboratories which do not require the specific properties of the synchrotron radiation. It has widespread practical value in the field of research and technology of VUV spectroscopy
soft X ray microscopy and photoetching etc. The paper mainly describes the operation principle
the design thought and the specific structure of the source. The time-resolved spectra of the BRV plasma source has been studied at different wavelength in a range of 50-300 nm. The temporal response of optical pulse radiation on the order of millimicrosecond has been probed. We determined relative spectral distribution characteristic of the source. It is discussed that the influence of several outer discharge parameter on the spectral characterlstic and the discharge stability. By adding a cap made of teflon on top of the anode
the reproducibility and radiance have been improved further.
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