Xu Jinqiang. Investigation on 3-D Profile Measurement of Aspheric Compensator[J]. Editorial Office of Optics and Precision Engineering, 1993,(5): 161-164
Xu Jinqiang. Investigation on 3-D Profile Measurement of Aspheric Compensator[J]. Editorial Office of Optics and Precision Engineering, 1993,(5): 161-164DOI:
A method of aspheric surface measurement by laser autocollimation is discussed in this paper
which is a non-contacting method but no fringes to be processed as interferometers need to do. Using CCD to detecting the output of surface slope
then the slope values obtained are integrated with respect to distance to obtain profile height. The measurement system is carefully analyzed in this paper by which rotational symmertrical mirrors used as a wavefront compensator in optical system can be surveyed along their meridians. Two demensional surveying can be carried out by rotating the mirror around its symmetrical axis in order to obtain the information data about the three dimensional profile of the test mirror. A reliable software to process the source data and to reconstruct the 3D profile of the test mirror is completed which can output height curve or surface profile and can also achieve other functions.