This thesis reaserches the elementery character of the soft X-ray propagation from theinterface of two media

gives popular theory of one-order scattering of solft X-ray from interface. so this result can be given

the specular scatterin coefficient should be revised by Debye-waller factor. Being form methods

This paper also gives a dynamic model of total externalreflection from rough surface

and one dimension theory of measuring roughness by soft X-ray scattering. The experiments gives the reflectance ofλ=243Å

256Å soft X-ray refleetedfrom supersmooth sample of Mo and Si;and λ=44.6Å from supersmooth sample of SiO

2

plating CsI to CEM extends the measuring wavelength limit of our equipment to even shorter

from 200Å to l0Å. By means of measuring the scattering of SiO

2

sample by 44.6Å

tbeanormalous reflection of soft X-ray can be observed

and the sample roughress can be abtained.Finally

the thesis gives the theory and design method of kumakhov lens briefly.