张二星, 阮锦, 赵军. 用于测量微图形的高速机械扫描系统[J]. 光学精密工程, 1994,(3): 80-84

Zhang Erxing, Ruan Jin, Zhao Jun. A High-speed Mechanical Scanning System for Measuring Micro Figure[J]. Editorial Office of Optics and Precision Engineering, 1994,(3): 80-84

张二星, 阮锦, 赵军. 用于测量微图形的高速机械扫描系统[J]. 光学精密工程, 1994,(3): 80-84 DOI：

Zhang Erxing, Ruan Jin, Zhao Jun. A High-speed Mechanical Scanning System for Measuring Micro Figure[J]. Editorial Office of Optics and Precision Engineering, 1994,(3): 80-84 DOI：