Zhang Junping, Ma Yueying, Gao Honggang, Chen Bin, Pei Shu, Lu Junxia, Cao Jianlin. Soft X-ray Multilayer Fabrication by Magnetron Sputtering[J]. Editorial Office of Optics and Precision Engineering, 1995,(1): 16-20
Zhang Junping, Ma Yueying, Gao Honggang, Chen Bin, Pei Shu, Lu Junxia, Cao Jianlin. Soft X-ray Multilayer Fabrication by Magnetron Sputtering[J]. Editorial Office of Optics and Precision Engineering, 1995,(1): 16-20DOI:
The preliminary experiment of fabricating soft X-ray multilayer by DC-RF planar mag-netron sputtering is described. Under appropriate working conditions
multilayers can be au-tomatically deposited according to designed period (thickness)using computer controlledtiming method. The results of X-ray small angle diffraction show that the film thickness ac-curacv is about 0.1nm.