Sun Jiazi, Zeng Zhoumo, Yang Ming. Researches on Mieromachines and Microactuators at Abroad[J]. Editorial Office of Optics and Precision Engineering, 1995,(3): 8-13
Sun Jiazi, Zeng Zhoumo, Yang Ming. Researches on Mieromachines and Microactuators at Abroad[J]. Editorial Office of Optics and Precision Engineering, 1995,(3): 8-13DOI:
academic circles have paid more andmore attention to the research of micro machines.The micromachines are various
for exam-ple
self-controled micromachines can safeguard and inspect in some narrow and dangerousplaces;some of them can enter man's cavities even blood vessels to examine and operate thediseased parts;the microactuators in the scanning tunneling microscope(STM)and atomicforce microscope can reach a resolution in nm. Recently
in order to improve the research inmicromachines
microactuator and microrobot
contests which are composed of climbingmoutain. climbing cliff
selfshow etc.are held periodically in Japan. Because micromachinemust be movable
the microactuators become the most important in the domain of micromachines. This paper summarizes the principles of micromachines and microactuators