颜一鸣, 王大椿, 赫业军, 杨存耿, 张胜基, 刘安东. 使用平行束软X光透镜的深亚微米X射线光刻[J]. 光学精密工程, 1995,(4): 62-65

Yan Yiming, Wang Dachun, He Yejun, Yang Cungeng, Zhang Shengji, Liu Andong. A deep sub-micron X-ray lithography by using a soft parallel beam X-ray lens[J]. Editorial Office of Optics and Precision Engineering, 1995,(4): 62-65

颜一鸣, 王大椿, 赫业军, 杨存耿, 张胜基, 刘安东. 使用平行束软X光透镜的深亚微米X射线光刻[J]. 光学精密工程, 1995,(4): 62-65 DOI：

Yan Yiming, Wang Dachun, He Yejun, Yang Cungeng, Zhang Shengji, Liu Andong. A deep sub-micron X-ray lithography by using a soft parallel beam X-ray lens[J]. Editorial Office of Optics and Precision Engineering, 1995,(4): 62-65 DOI：