Lu Dunwu, Shen Beijun, Wang Delin, He Wei, Huang Liju. Study on Assembly Microelement for Micromechanics[J]. Editorial Office of Optics and Precision Engineering, 1995,(3): 56-59
Lu Dunwu, Shen Beijun, Wang Delin, He Wei, Huang Liju. Study on Assembly Microelement for Micromechanics[J]. Editorial Office of Optics and Precision Engineering, 1995,(3): 56-59DOI:
we study the methods of grabing and releasing microelement and demands of optical observation system. We also design an assembly apparatus to assemble some micromotors.The result is satisfactory.