Elements with supersmooth surfaces are demanded in many fields along with thedevelopment of modern science and technology

which present high contour accuracy

extremely Iow surface roughness

perfect crystalline distribution and nondamaged layers.Lots of new fabricating techniques have been applied to obtain supersmooth surfaces withsurface roughness < 1 nm and contour accuracy < 30 nm

This paper introduces theapplication of such surfaces

and from the point of stock removing mechanism

discusses 6different superpolishing techniques. Bowl Feed Polishing

Teflon Polishing

Ion Beanfiguring

Float Polishing

Plasma Assisted Chemical Etching

Ductile Grinding.