Lu Junxia, Ma Yueying Zhang Junping, Wang Zhanshan, Cao Jianlin. Soft X-Ray Multilayers at Wavelengths below 10nm[J]. Editorial Office of Optics and Precision Engineering, 1996,(2): 19-24
Lu Junxia, Ma Yueying Zhang Junping, Wang Zhanshan, Cao Jianlin. Soft X-Ray Multilayers at Wavelengths below 10nm[J]. Editorial Office of Optics and Precision Engineering, 1996,(2): 19-24DOI:
This paper introduces the soft X-ray multilayers at wavelengths below 10um andsummaries some rules of selecting the multilayer meterials. We design the Ru/B
4
C、Rh/B
4
C and Mo/B
4
C multilayers for sum wavelength at normal incidence
and give the idealreflectivities of 38%~50%. The effect of thickness control error as well surface-interfaceroughness is also discussed. These will be use fill in next research of fabrication procedure.