L&#252; Junxia, Cao Jianlin. Preliminary Researches of Mo/B<sub>4</sub>C Multelayers at 8.0 nm Wavelength[J]. Editorial Office of Optics and Precision Engineering, 1996,4(5): 36-40
L&#252; Junxia, Cao Jianlin. Preliminary Researches of Mo/B<sub>4</sub>C Multelayers at 8.0 nm Wavelength[J]. Editorial Office of Optics and Precision Engineering, 1996,4(5): 36-40DOI:
This thesis represents the preliminary results of normal-incidence Mo/B
4
C soft X-ray multi-layer for 8.0 nm
The fabrication procedure including material selection
the design and perfor-mfince simulation of soft X-ray multilayers
and coating technique by magnetron sputtering is discussed. The microstructure of samples are characterized by low-angle X-ray diffraction. These multilayer mirrors will be used in the double-path ezperiments of X-ray laser researches.