微器件装配系统与关键技术

李云平; 龙志峰; 李庆祥; 王晓晔; 薛实福

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微器件装配系统与关键技术

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- 微器件装配系统与关键技术
- The Assembly System and Key Technique of Micro Elements for Micro Mechanics
- 光学精密工程 1997年5卷第3期页码：1-6
- 作者机构：
  
  清华大学精密仪器与机械学系北京,100084
- 作者简介：
- 基金信息：
- DOI：
  中图分类号：
- 收稿日期：1997-01-06，
  
  网络出版日期：1997-06-15，
  
  纸质出版日期：1997-06-15
- 稿件说明：
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李云平, 龙志峰, 李庆祥, 王晓晔, 薛实福. 微器件装配系统与关键技术[J]. 光学精密工程, 1997,(3): 1-6

Li Yunping, Long Zhifeng, Li Qingxiang, Wang Xiaoye, Xue Shifu. The Assembly System and Key Technique of Micro Elements for Micro Mechanics[J]. Editorial Office of Optics and Precision Engineering, 1997,(3): 1-6
李云平, 龙志峰, 李庆祥, 王晓晔, 薛实福. 微器件装配系统与关键技术[J]. 光学精密工程, 1997,(3): 1-6 DOI：

Li Yunping, Long Zhifeng, Li Qingxiang, Wang Xiaoye, Xue Shifu. The Assembly System and Key Technique of Micro Elements for Micro Mechanics[J]. Editorial Office of Optics and Precision Engineering, 1997,(3): 1-6 DOI：

摘要

微装配技术是实现组合结构的微机械电子学系统的关键技术之一。本文介绍了目前两种典型的可以实现不同功能的微器件装配系统以及设计微器件装配系统的关键技术。

Abstract

Micro assembly is one key techniques in realizing MEMS. In this paper

two micro assembly systems

one based on the SEM technique

the other on the traditional optical microscope (TOM)

are proposed

their features are analyzed and their construction and key design techniques are described. The micro assembly system that based on the SEM technique is found to have the quality of high resolution

large focus depth and the ability of nano score operation. One of the disadvantage is its high cost and complex operation. On the other hand

the system that based on the TOM is easy to operate and much economical. It is a valid technique for our project.

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