Xie Lun, Gao Honggang, Chen Bin, Cao Jianlin, Wang Jianming, Liu Lin. The Primary Study of Superpolishing of LiGaO<sub>2</sub> Single Crystal for a Substrate of GaN Thin Film[J]. Editorial Office of Optics and Precision Engineering, 1997,(5): 57-62
Xie Lun, Gao Honggang, Chen Bin, Cao Jianlin, Wang Jianming, Liu Lin. The Primary Study of Superpolishing of LiGaO<sub>2</sub> Single Crystal for a Substrate of GaN Thin Film[J]. Editorial Office of Optics and Precision Engineering, 1997,(5): 57-62DOI:
This paper represents a method and primary experimental results of superpolishing of LiGaO
2
signle crystal as a substrate for GaN.We have achieved supersmooth surface roughness of less than 0.1nm by the chemo mechanical polishing with polyurethane lap and SiO