The Method of Micro tiny Displacement Measurement by Dimension Reduction
光学精密工程1998年6卷第2期 页码:115-119
作者机构:
中国科学院长春光学精密机械研究所 长春,130022
作者简介:
基金信息:
DOI:
中图分类号:
收稿日期:1997-09-26,
修回日期:1998-01-14,
网络出版日期:1998-04-15,
纸质出版日期:1998-04-15
稿件说明:
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贺庚贤. 降维测量微小位移的方法[J]. 光学精密工程, 1998,(2): 115-119
HE Geng-Xian . The Method of Micro tiny Displacement Measurement by Dimension Reduction[J]. Editorial Office of Optics and Precision Engineering, 1998,(2): 115-119
HE Geng-Xian . The Method of Micro tiny Displacement Measurement by Dimension Reduction[J]. Editorial Office of Optics and Precision Engineering, 1998,(2): 115-119DOI:
This paper describes the principle of micro tiny displacement measurement by dimension reduction.Based the principle
micro tiny displacement test system has been established.The method of testing two dimentional displacement using a linear CCD is relized.Test system struction