A new class sensors based on electron tunneling effect are used to detect position.The device has a compact mechanical structure and novel sensitivity that will not decreases with the scales

and can be easily operated.Accelerometers

infrared detectors

magnetometers

and tactile sensors have been designed

built and tested.These sensors provide extremely high sensitivity

high bandwidth and wide dynamic range

and allowed miniaturization and integration.This paper has described the electron tunneling sensors performance and discussed their future development.