In this paper

the leading feature of existent micromachining technology of AFM force sensors is discussed.On the basis of those

two step corrosion with KOH solution are researched

using heavily boron doped silicon as etch stop layer.Cantilever beams with precise thickness are formed from single crystal silicon.By means of SiO 2 mask and SF 6 etching corrosive

the cantilever beam with tip is shaped by reactive ion etching once through operation.The probe has been shaped by wet corrosive and the tip radius is about 50 nm.A batch fabrication process based on micromachining technology is presented for cantilevers with integrated conical tips which are suitable for the AFM.