刘毅楠, 王占山, 李哲, 曹健林, 林宜平. 软 X 射线接触式显微术抗蚀膜显影条件分析[J]. 光学精密工程, 1997,(5): 73-77

Liu Yinan, Wang Zhangshan, Li Zhe, Lin Yiping, Cao Jianlin, Lin Yiping. Development Conditions of Resist in Soft X-Ray Contact Microscopy[J]. Editorial Office of Optics and Precision Engineering, 1997,(5): 73-77

刘毅楠, 王占山, 李哲, 曹健林, 林宜平. 软 X 射线接触式显微术抗蚀膜显影条件分析[J]. 光学精密工程, 1997,(5): 73-77 DOI：

Liu Yinan, Wang Zhangshan, Li Zhe, Lin Yiping, Cao Jianlin, Lin Yiping. Development Conditions of Resist in Soft X-Ray Contact Microscopy[J]. Editorial Office of Optics and Precision Engineering, 1997,(5): 73-77 DOI：