Using scanning electron microscopy (SEM) and surface style measurement.We have investigated the surface microstructure and morphology of the rectangular arch quartz microlens array fabricated by Ar ion beam etching. The reason induced the surface defect of quartz microlens has been discussed. The methods improving surface microstructure and morphology have been analyzed

The surface morphology differences of the microlens devices fabricated by ion beam etching under the different conditions have been given.In addition

we also introduce several key operations to the quartz samples prepared. The process for preparing quartz microlens has been discussed.