傅丹鹰, 殷纯永, 乌崇德. 微光学机电系统的发展和应用[J]. 光学精密工程, 1998,(4): 7-14

FU Dan-Ying, YIN Chun-Yong, WU Chong-De. The Development and Applications of Micro Opto Electro Mechanical Systems[J]. Editorial Office of Optics and Precision Engineering, 1998,(4): 7-14

傅丹鹰, 殷纯永, 乌崇德. 微光学机电系统的发展和应用[J]. 光学精密工程, 1998,(4): 7-14 DOI：

FU Dan-Ying, YIN Chun-Yong, WU Chong-De. The Development and Applications of Micro Opto Electro Mechanical Systems[J]. Editorial Office of Optics and Precision Engineering, 1998,(4): 7-14 DOI：