KE Chang-Jun, ZHENG Yong-Mei, ZHANG Tie-Qiang, WANG Zhan-Shan, CAO Jian-Lin, CHEN Xing-Dan. The Design of Soft X-ray Broadband and Flat Multilayer[J]. Editorial Office of Optics and Precision Engineering, 1999,(3): 19-22
KE Chang-Jun, ZHENG Yong-Mei, ZHANG Tie-Qiang, WANG Zhan-Shan, CAO Jian-Lin, CHEN Xing-Dan. The Design of Soft X-ray Broadband and Flat Multilayer[J]. Editorial Office of Optics and Precision Engineering, 1999,(3): 19-22DOI:
A technique used for designing soft X-ray multilayer for broadband and flat reflection has been developed. As an example
we present design result calculation in the 18nm 20nm spectral range. In the range the maximum deviation from 25% reflectivity level is less than 1.5%. It is very important for spectrum imaging and spectrum analysis.