周华, 沈连官, 尤辉, 李川奇. 电容式微加速度计结构的建模及仿真[J]. 光学精密工程, 1999,(4): 59-64

ZHOU Hua, SHEN Lian-Guan, YOU Hui, LI Chuan-Qi . Structure Design and Simulation of Capacitive Micro accelerometer[J]. Editorial Office of Optics and Precision Engineering, 1999,(4): 59-64

周华, 沈连官, 尤辉, 李川奇. 电容式微加速度计结构的建模及仿真[J]. 光学精密工程, 1999,(4): 59-64 DOI：

ZHOU Hua, SHEN Lian-Guan, YOU Hui, LI Chuan-Qi . Structure Design and Simulation of Capacitive Micro accelerometer[J]. Editorial Office of Optics and Precision Engineering, 1999,(4): 59-64 DOI：