It is necessary to measure Young's modulus of micro-mained materials because of the special manufacture process by using silicon etching technique. This is a new theme proposed with the appearance of micro-machined parts. In this paper the published methods of Young's modulus measurement for micro-machined materials are summarized

after that

both acoustically-excited and instantly-excited methods of Young's modulus measurement for micro-machined materials are proposed. These two methods have some features such as simplifying the test devices

easy operation and high accuracy.