表面微观轮廓的高分辨率光学测量方法

王富生; 谭久彬

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表面微观轮廓的高分辨率光学测量方法

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- 表面微观轮廓的高分辨率光学测量方法
- Methods of high resolution optical measurement for surface profile
- 光学精密工程 2000年8卷第4期页码：309-315
- 作者机构：
  
  哈尔滨工业大学自动化测试与控制系,黑龙江哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TB92
- 收稿日期：2000-02-21，
  
  修回日期：2000-04-24，
  
  网络出版日期：2000-08-15，
  
  纸质出版日期：2000-08-15
- 稿件说明：
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王富生, 谭久彬. 表面微观轮廓的高分辨率光学测量方法[J]. 光学精密工程, 2000,(4): 309-315

WANG Fu-sheng, TAN Jiu-bin . Methods of high resolution optical measurement for surface profile[J]. Editorial Office of Optics and Precision Engineering, 2000,(4): 309-315
王富生, 谭久彬. 表面微观轮廓的高分辨率光学测量方法[J]. 光学精密工程, 2000,(4): 309-315 DOI：

WANG Fu-sheng, TAN Jiu-bin . Methods of high resolution optical measurement for surface profile[J]. Editorial Office of Optics and Precision Engineering, 2000,(4): 309-315 DOI：

摘要

较全面地介绍了用于表面微观轮廓测量的几种高分辨率甚至可达亚纳米的光学测量方法及其最新进展.文中重点描述了以扫描共焦显微检测法、离焦误差检测法为代表的光触针法

以TOPO轮廓仪、Nomarski显微镜、外差干涉轮廓仪、双焦干涉轮廓仪和同轴干涉轮廓仪为代表的干涉测量法和以扫描近场光学显微镜及光子扫描隧道显微镜为代表的近场光学法三种适用于表面微观轮廓测量的光学测量方法

分别介绍了其工作原理、特性、发展现状及存在问题

通过对这些方法的对比和总结

阐述了表面微观轮廓纳米级光学测量的发展趋势.

Abstract

The methods of optical measurement for surface profiles with high resolution even sub nanometer are presented generally. In the paper

three optical methods for measuring surface profile

optical probe

interferometric method and near-field optics method

are mainly described. Optical probes include scanning confocal microscopy and defocus error detection. Interferometric methods include TOPO interferometric profilometer

Nomarski microscope

Heterodyne profilometry

double focus profilometer and coaxial profilometer. Near field optics methods include scanning near-field optical microscopy and photo scanning optical microscopy. By reviewing and contrasting the principles

characteristics and problems with these methods

the trends of high resolution optical measurement for surface profiles are described.

关键词

Keywords

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