The diffractive optical elements (DOE) with shaping the focused spot for laser writing system are designed

while discussing their performances for shaping laser writing spot. An efficient way of using a DOE to shape the laser writing spot under the objectives with various focal lengths is presented. The simulating results indicate that the spot-shaped sizes is only more twice than the diffraction limited spot sizes under this system

its diffraction efficiency is about 71.38% and the edges of the uniform area become dramatically sharper than the result without DOE.