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中国科学院长春光学精密机械与物理研究所, 吉林长春, 130022
收稿日期:2000-10-10,
修回日期:2000-11-18,
网络出版日期:2001-02-15,
纸质出版日期:2001-02-15
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鱼卫星, 卢振武, 王鹏, 翁志成. 亚波长周期结构与多层增透膜反射特性的比较[J]. 光学精密工程, 2001,(1): 10-13
YU Wei-xing, LU Zhen-wu, WANG Peng, WENG Zhi-cheng. Comparison of periodic subwavelength structure and multilayer antireflection coatings[J]. Editorial Office of Optics and Precision Engineering, 2001,(1): 10-13
为解决光学系统中普遍存在的菲涅耳反射问题
利用严格耦合波法设计、分析了一种三维轮廓亚波长结构
然后把计算结果同多层反射膜的增透特性进行了比较
结果表明该结构在很宽的波段上尤其是远红外波段上的抗反射特性要远远好于多层膜
其反射率基本上能控制在0.2%以内;并且这种结构反射率的变化随入射光波入射角的偏离在40°以内能保持在1%以下
而多层膜只能在30°以内勉强做到这一点。
To solve the Fresnel reflection which exits generally in optical systems
we designed and analyzed one kind of structures
subwavelength surface-relief periodic structures
which have three-dimension profile
using the coupled wave method. Then comparing the calculated results with the characteristics of multilayer antireflection coatings
it was found that this subwavelength periodic structure is far more efficient than multilayer antireflection coating in a wide wave band
particularly in infrared wave band
and the reflection ratio can be controlled in 0.2% in general. Besides this
the variety of reflection of this subwavelength periodic structure can be maintained in 1% when incident angle of incident wave has a 40? deflection
while for multilayer antireflection coatings
it just can do this in 30?.
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普尔克尔 H K著.仲永安,等,译.玻璃镀膜(第一版)[M].北京:科学出版社,391.
Cox J T. Special type of double-layer antireflection coating for infrared optical materials with high reflective indices[J].J.Opt.Soc.Am,1961,51(12):1406-1408.
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