全柔性机构与MEMS

于靖军; 宗光华; 毕树生

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全柔性机构与MEMS

论文 | 更新时间：2020-08-12

- 全柔性机构与MEMS
- Fully compliant mechanisms and MEMS
- 光学精密工程 2001年9卷第1期页码：1-5
- 作者机构：
  
  北京航空航天大学机器人研究所, 北京, 100083
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(50075010)();863高技术资助项目(863-512-98-04-26)()
- DOI：
  中图分类号： ATP23
- 收稿日期：2000-10-20，
  
  修回日期：2000-11-01，
  
  网络出版日期：2001-02-15，
  
  纸质出版日期：2001-02-15
- 稿件说明：
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于靖军, 宗光华, 毕树生. 全柔性机构与MEMS[J]. 光学精密工程, 2001,(1): 1-5

YU Jing-jun, ZONG Guang-hua, BI Shu-sheng. Fully compliant mechanisms and MEMS[J]. Editorial Office of Optics and Precision Engineering, 2001,(1): 1-5
于靖军, 宗光华, 毕树生. 全柔性机构与MEMS[J]. 光学精密工程, 2001,(1): 1-5 DOI：

YU Jing-jun, ZONG Guang-hua, BI Shu-sheng. Fully compliant mechanisms and MEMS[J]. Editorial Office of Optics and Precision Engineering, 2001,(1): 1-5 DOI：

摘要

柔性机构是一种新型机构。首先描述了柔性机构和全柔性机构的概念及特点

论述了它们与MEMS之间的关系。然后详细介绍了全柔性机构在MEMS领域内包括微装配、微操作等应用背景下的状况及前景。最后就对全柔性机构研究中的几个关键技术问题如机构的分析、设计及加工

柔性铰链的选择与设计

驱动器的选择及设计等进行了探讨。

Abstract

Compliant mechanisms are devices that deliver a desired motion by undergoing elastic deformation. A typical compliant mechanisms is called fully compliant mechanism. Owing to their serveral significant advantages relative to conventional mechanisms such as no backlash and friction

and no assembly

compliant mechanisms especially fully compliant mechanisms have been applied to many fields especially in MEMS. So research on compliant mechanisms and fully compliant mechanisms has been a hot issue in recent years. This paper firstly describes their concepts

characteristics and applications in MEMS. Finally several critical techniques and tendencies such as the analysis

design and fabrication of fully compliant mechanisms

selection and design of flexure hinge

selection

desgin and control of the actuator etc. are discussed.

关键词

Keywords

references

Midha A, et al. On the nomenclature, classification, and abstractions of compl iant mechanisms[J].ASME J.of Mechanical Design,1994,116(1):270-279.

Kota S, et al. Tailoring unconventional actuators using compliant transmissions: design methods and applications[J].IEEE/ASME Trans. on Mechatronics,1992,4(4):396-408.

Trimmer W. Microrobots and micromechanical system[J]. Sensors & Actuators, 1989,19(3):267-287.

Jensen B, et al. Design of two-link, in-plane, bistable compliant micro-mechanisms[J].ASME J. of Mechanical Design, 1999,2(3):416-423.

Yu J, et al. Kinematics analysis of spatial fully compliant mechanisms by using the pseudo-rigid-body model[A]. The 1st ICME 2000[C].Shanghai:2000.

Ananthasuresh G K. A new design paradigm in microelectromechanical systems & investigations on compliant mechanisms[D].Ph.D. dissertation, Ann Arbor: University of Michigan, 1994.

Frecker, et al. Topological synthesis of compliant mechanisms using multi-criteria optimization[J].ASME J. of Mechanical Design,1997,119(2):238-243.

Brequet J, et al. Activities on microfactory in the institute of robotics systems at the EPFL[J／OL].jean-marc.breguet@epfl.ch.1999.

李勇,等.特种微型机械加工技术[J].光学精密工程,2000,8(3):286-291.

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