CHI Dong-xiang, YAN Guo-zheng, DING Guo-qing . Inertia-friction based 4 D.O.F. microactuator driven by PZT[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 135-138
CHI Dong-xiang, YAN Guo-zheng, DING Guo-qing . Inertia-friction based 4 D.O.F. microactuator driven by PZT[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 135-138DOI:
An inertia friction based 4 D.O.F microactuator driven by PZT is presented. The 4 D.O.F microactuator prototype made based on an experiment and its kinematic characteristics are discussed. The experiment proves that it is feasible to apply the driving principle to the microactuator. The microactuator is linear and controllable at the frequency between 0 to 3000 Hz of voltage. The existing design problems and the future research on the microactuator are discussed as well.
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