The paper mainly describes the working function and basic principles of the vacuum induced polishing lap. In manufacturing a face sheet mirror in 120mm?120mm
with thickness to diameter ratio less than 1/60
the mirror deformation caused by the self weight of polishing lap
the support requirement for processing the mirror
as well as the key problems concerning the digital control manufacturing of the ultra thin mirror have been solved successfully.
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references
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Parks Robert E,Evans Chris J. Applications of the rapidly renewable lap[C].Proc. SPIE,1997,3134:240-251.
Miller S,Burge J. A fabrication plan for ultra light mirrors for NGST[A]. in Optical Fabrication and Testing-OSA 1998,Technical Digest Series[C],1998,12:110-121.