Research on Reaction-bonded SiC for Optical Application

WANG Jun-lin; XU Chang-shan

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Research on Reaction-bonded SiC for Optical Application

论文 | 更新时间：2020-08-12

- Research on Reaction-bonded SiC for Optical Application
- Research on Reaction-bonded SiC for Optical Application
- 光学精密工程 2001年9卷第5期页码：478-482
- 作者机构：
  
  Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130022, China
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TH703
- 收稿日期：2001-08-29，
  
  修回日期：2001-09-17，
  
  网络出版日期：2001-10-15，
  
  纸质出版日期：2001-10-15
- 稿件说明：
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WANG Jun-lin, XU Chang-shan . Research on Reaction-bonded SiC for Optical Application[J]. 光学精密工程, 2001,(5): 478-482

WANG Jun-lin, XU Chang-shan . Research on Reaction-bonded SiC for Optical Application[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 478-482
WANG Jun-lin, XU Chang-shan . Research on Reaction-bonded SiC for Optical Application[J]. 光学精密工程, 2001,(5): 478-482 DOI：

WANG Jun-lin, XU Chang-shan . Research on Reaction-bonded SiC for Optical Application[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 478-482 DOI：

摘要

Ultrasonic treatment technology is utilized to fabricate RBSiC

and a new polishing technology-float polishing is developed to process RBSiC. SEM

XRD

AFM. Raman scattering and WYCO are applied to measure and analyze the RBSiC and the polished surface. The results indicate that the ultrasonic treatment decreases the content of the free Si and makes RBSiC denser and more uniformity. The float polishing technology is suitable for polishing RBSiC effectively.

Abstract

Ultrasonic treatment technology is utilized to fabricate RBSiC

and a new polishing technology-float polishing is developed to process RBSiC. SEM

XRD

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