Computer Controlled Polishing of the Off-axis Aspheric Mirrors

ZHANG Xue-jun; WENG Zhi-cheng; ZHANG Zhong-yu; WANG Quan-dou; ZHANG Feng

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Computer Controlled Polishing of the Off-axis Aspheric Mirrors

论文 | 更新时间：2020-08-12

- Computer Controlled Polishing of the Off-axis Aspheric Mirrors
- Computer Controlled Polishing of the Off-axis Aspheric Mirrors
- 光学精密工程 2001年9卷第5期页码：467-473
- 作者机构：
  
  Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130022, China
- 作者简介：
- 基金信息：
  
  PartsoftheworkpresentedherearesupporttedbyNSFC'sfundingfordistinguishedyoungscholars
- DOI：
  中图分类号： TH744
- 收稿日期：2001-08-29，
  
  修回日期：2001-09-16，
  
  网络出版日期：2001-10-15，
  
  纸质出版日期：2001-10-15
- 稿件说明：
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ZHANG Xue-jun, WENG Zhi-cheng, ZHANG Zhong-yu, WANG Quan-dou, ZHANG Feng . Computer Controlled Polishing of the Off-axis Aspheric Mirrors[J]. 光学精密工程, 2001,(5): 467-473

ZHANG Xue-jun, WENG Zhi-cheng, ZHANG Zhong-yu, WANG Quan-dou, ZHANG Feng . Computer Controlled Polishing of the Off-axis Aspheric Mirrors[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 467-473
ZHANG Xue-jun, WENG Zhi-cheng, ZHANG Zhong-yu, WANG Quan-dou, ZHANG Feng . Computer Controlled Polishing of the Off-axis Aspheric Mirrors[J]. 光学精密工程, 2001,(5): 467-473 DOI：

ZHANG Xue-jun, WENG Zhi-cheng, ZHANG Zhong-yu, WANG Quan-dou, ZHANG Feng . Computer Controlled Polishing of the Off-axis Aspheric Mirrors[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 467-473 DOI：

摘要

In this paper

the manufacturing and testing procedures to make large off-axis aspherical mirrors are presented. The difficulties in polishing and testing for both circular aperture and rectangular aperture mirrors are previewed

and a possible solution is given. The two mirrors have been polished by means of CCOS

and the final accuracy is 25nm rms for 770mm×210mm rectangular mirror and 20nm rms for φ600mm circular mirror. These results just meet the optical tolerances specified by the designer

and the manufacturing and testing procedures presented here show good ability to make the large off-axis aspherical mirrors.

Abstract

In this paper

and a possible solution is given. The two mirrors have been polished by means of CCOS

and the final accuracy is 25nm rms for 770mm×210mm rectangular mirror and 20nm rms for φ600mm circular mirror. These results just meet the optical tolerances specified by the designer

and the manufacturing and testing procedures presented here show good ability to make the large off-axis aspherical mirrors.

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