Synchrotron Radiation Lithography and MEMS Technique at NSRL

LIU Gang; TIAN Yang-chao

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Synchrotron Radiation Lithography and MEMS Technique at NSRL

论文 | 更新时间：2020-08-12

- Synchrotron Radiation Lithography and MEMS Technique at NSRL
- Synchrotron Radiation Lithography and MEMS Technique at NSRL
- 光学精密工程 2001年9卷第5期页码：455-457
- 作者机构：
  
  National Synchrotron Radiation Laboratory, University of Science and Technology of China Hefei,China,230029
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TL544
- 收稿日期：2001-08-29，
  
  修回日期：2001-09-25，
  
  网络出版日期：2001-10-15，
  
  纸质出版日期：2001-10-15
- 稿件说明：
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LIU Gang, TIAN Yang-chao . Synchrotron Radiation Lithography and MEMS Technique at NSRL[J]. 光学精密工程, 2001,(5): 455-457

LIU Gang, TIAN Yang-chao . Synchrotron Radiation Lithography and MEMS Technique at NSRL[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 455-457
LIU Gang, TIAN Yang-chao . Synchrotron Radiation Lithography and MEMS Technique at NSRL[J]. 光学精密工程, 2001,(5): 455-457 DOI：

LIU Gang, TIAN Yang-chao . Synchrotron Radiation Lithography and MEMS Technique at NSRL[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 455-457 DOI：

摘要

Two beamlines and stations for soft X-ray lithography and hard X-ray lithography at NSRL are presented. Synchrotron radiation lithography (SRL) and mask techniques are developed

and the micro-electro-mechanical systems (MEMS) techniques are also investigated at NSRL. In this paper

some results based on SRL and MEMS techniques are reported

and sub-micron and high aspect ratio microstructures are given. Some micro-devices

such as microreactors are fabricated at NSRL.

Abstract

Two beamlines and stations for soft X-ray lithography and hard X-ray lithography at NSRL are presented. Synchrotron radiation lithography (SRL) and mask techniques are developed

and the micro-electro-mechanical systems (MEMS) techniques are also investigated at NSRL. In this paper

some results based on SRL and MEMS techniques are reported

and sub-micron and high aspect ratio microstructures are given. Some micro-devices

such as microreactors are fabricated at NSRL.

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