移相式数字波面干涉仪中的几个技术问题

于瀛洁; 韦春龙; 陈明仪

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移相式数字波面干涉仪中的几个技术问题

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- 移相式数字波面干涉仪中的几个技术问题
- Technical Problems in Digital Phase-stepping Flatness Interferometers
- 光学精密工程 2001年9卷第6期页码：584-587
- 作者机构：
  
  上海大学精密机械工程系, 上海, 200072
- 作者简介：
- 基金信息：
  
  上海市教委青年基金项目()
- DOI：
  中图分类号： TH744.3
- 收稿日期：2001-08-20，
  
  修回日期：2001-09-01，
  
  网络出版日期：2001-12-15，
  
  纸质出版日期：2001-12-15
- 稿件说明：
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于瀛洁, 韦春龙, 陈明仪. 移相式数字波面干涉仪中的几个技术问题[J]. 光学精密工程, 2001,(6): 584-587

YU Ying-jie, WEI Chun-long, CHEN Ming-yi . Technical Problems in Digital Phase-stepping Flatness Interferometers[J]. Editorial Office of Optics and Precision Engineering, 2001,(6): 584-587
于瀛洁, 韦春龙, 陈明仪. 移相式数字波面干涉仪中的几个技术问题[J]. 光学精密工程, 2001,(6): 584-587 DOI：

YU Ying-jie, WEI Chun-long, CHEN Ming-yi . Technical Problems in Digital Phase-stepping Flatness Interferometers[J]. Editorial Office of Optics and Precision Engineering, 2001,(6): 584-587 DOI：

摘要

光学件波面测量在光学加工业中有着大量的需求

近年来相关测量技术发展非常迅速

其中移相技术是较典型的代表

发展日趋成熟并得到了广泛应用.以PG-15型平面干涉仪为硬件基础

采用移相技术

解决了其中移相值标定、相位解调、误差处理中的难点

研制了数字波面干涉仪.对干涉仪中的这几个关键技术问题进行了讨论

并给出了相应的解决方法.

Abstract

Flatness measurement of optical workpieces in optical manufacturing is very important. In recent years

the relative techniques have developed rapidly

expecially phase stepping technique

which has become mature gradually and has been applied widely. The paper utilizes the flatness interferometer

mode PG 15

as a basic hardware to design a digital flatness phase stepping interferometer. In the course of designing

a few of key difficulties had been overcome

including phase step calibration

phase unwrapping and error processing. The paper discusses these key techniques and presents their solving methods in detail.

关键词

Keywords

references

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