YE Lu. Micro-move devices for supporting and adjusting large membrane mirrors[J]. Editorial Office of Optics and Precision Engineering, 2002,(2): 201-204
YE Lu. Micro-move devices for supporting and adjusting large membrane mirrors[J]. Editorial Office of Optics and Precision Engineering, 2002,(2): 201-204DOI:
the lightweighting of an optical system becomes more and more important. Membrane with active rigid support(MARTS) was first made at the University of Arizona. The mirror features lightweight and fine surface accuracy
and its surface can be adjusted by many actuators. The thickness of the membrane mirror is 2.1mm
diameter
530mm
and mass
1.25kg. The actuator designed on the principle of piezoelectricity has the micro-moving of 20nm. During the trial manufacture
the author made an actuator by the method of mechanism. Its principle of micro-moving is based on leverage and changing of height of arc in the spherical surface. It can realize 20nm micro-moving
too. This device is characterized by simple structure
high sensitivity and easy manufacturing.
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references
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