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苏州大学, 现代光学技术研究所,江苏 苏州,215006
收稿日期:2002-03-24,
修回日期:2002-07-08,
网络出版日期:2002-10-15,
纸质出版日期:2002-10-15
移动端阅览
郭培基, 余景池, 孙侠菲. 一种大数值孔径小非球面检测用补偿器设计[J]. 光学精密工程, 2002,(5): 518-522
GUO Pei-ji, YU Jing-chi, SHUN Xia-fei. Null lens design for small aspherical surface with large NA[J]. Editorial Office of Optics and Precision Engineering, 2002,(5): 518-522
利用补偿器的补偿法是检测高精度非球面的一种非常重要的方法
它可以利用已广泛实用的Zygo等高精度的数字干涉仪
用补偿法的关键是补偿器的设计.本文介绍了补偿法检测非球面的原理
针对要检测一种大数值孔径小非球面模芯
设计了一种由4片薄球面透镜组成的补偿器
该补偿器由前后两部分组成
前面两片组成一个数值孔径很小的系统
主要用于产生适量的球差
后组两片组成一个数值孔径较大的系统
并与前面的一起满足被测非球面检测的需要.文中对制造、检测及装调等主要误差源引起误差进行了全面分析.用这种补偿器检测相应的非球面
检测精度可达0.05λ
可满足光盘物镜非球面模芯的检测需要.
Compensation null test is a very important method in testing aspherical surface with high accuracy
in which a Zygo high accuracy digital interferometer is used. The design of a null lens is the key problem for compensation null test. In this paper
the principle of compensation null test is described. In connection with the being tested small aspherical mold surface with large NA
we developed a kind of null lens system made up of four thin lenses. The first two thin lenses form a system with very small NA mainly used to produce suitable spherical aberration; the other two form a large NA system
which together with that of the front two elements meets the null testing need. The wavefront variation of testing system due to the manufacture
test
assembly and adjustment errors is analyzed in detail. We are capable of measuring the aspherical surface to the accuracy of 0.05λ
which is enough to satisfy the testing of the mold surfaces of compact disc object lenses.
James C.Wyant. Interferometric testing of aspheric surfaces[J] . SPIE,1987,816,19-39.
Malacara D. Optical shop testing[M] .Wiley & Sons: New York,1978:439-449.
Stahl H P.Aspheric surface testing techniques[J] .SPIE,1990,1332,66-76.
Dil J G,Greve P F. Measurement of steep aspheric surfaces[J] .Appl Opt.1978,553(17).
Visser D,Gijsbers T G,Jorna R A M. Molds and measurements for replicated aspheric lenses for optical recording[J] . Appl.Opt.1985,24:18-48.
Juang J D,Chang M W.Making a null lens by using optimization and manufacturing iterations[J] . SPIE,1994,135-144.
潘君骅. 光学非球面的设计、加工与检验[M] .科学出版社,1994.
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